Granted Patent
Utility
US 6,605,226
· Confirmation No. 1169
METHOD FOR INCREASED WORKPIECE THROUGHPUT
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-04-05 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2013-04-05 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2013-02-24 | PA.. |
Power of Attorney | 1 | View | |
| 2013-02-24 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2013-02-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2002-06-10 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-06-10 | SPEC |
Specification | 14 | View | |
| 2002-06-10 | CLM |
Claims | 2 | View | |
| 2002-06-10 | ABST |
Abstract | 1 | View | |
| 2002-06-10 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2002-06-10 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Albert Wang
Moraga, CA
Scott Baron
Menlo Park, CA
Prasad Padmanabhan
San Francisco, CA
Gerald M. Cox
Lafayette, CA
Attorneys & Agents of Record
Classification
USPC
438/725
G03F7/427
H10P50/287
Prosecution
- Examiner
- OLSEN, ALLAN W
- Art Unit
- 1763
- Customer No.
- 91286
- Docket No.
- NVLS008050D1
- Confirmation No.
- 1169
Publication
- Pub. No.
- US20020151184A1
- Pub. Date
- 2002-10-17
Patent Term Adjustment
-56days
from
SILICON VALLEY BANK
TERMINATION OF SECURITY AGREEMENT
Recorded 2013-04-16
CORRECTIVE ASSIGNMENT TO CORRECT THE SPELLING OF ASSIGNEE NAME PREVIOUSLY RECORDED ON REEL 014885 FRAME 0260. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNEE NAME IS AXCELIS TECHNOLOGIES, INC.
Recorded 2013-02-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2012-12-21
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-01-13
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- Patent No.
- US 6,605,226
- App. No.
- 10/170,621
- Filed
- 2002-06-10
- Granted
- 2003-08-12
- Pub. No.
- US20020151184A1
- Examiner
- OLSEN, ALLAN W
- Art Unit
- 1763
- PTA
- -56 days
External Links