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App. No. 10/285,161 · Confirmation No. 1617

HIGH THROUGHPUT DUAL ION BEAM DEPOSITION APPARATUS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2014-08-06 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2014-06-05 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2005-09-27 COCOUT Certificate of Correction - Post Issue Communication 1 View
2005-08-22 COCIN Request for Certificate of Correction 2 View
2004-11-01 LET. Miscellaneous Incoming Letter 3 View
2004-08-10 BIB Bibliographic Data Sheet 1 View
2004-07-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-07-15 LET. Miscellaneous Incoming Letter 1 View
2004-05-11 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-11 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-05-11 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-05-11 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-11 FWCLM Index of Claims 1 View
2004-05-11 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-04-09 CLM Claims 8 View
2004-04-09 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-02-02 CTNF Non-Final Rejection 8 View
2004-02-02 892 List of references cited by examiner 1 View
2004-02-02 FWCLM Index of Claims 1 View
2004-02-02 SRFW Search information including classification, databases and other search related notes 1 View
2002-10-31 TRNA Transmittal of New Application 2 View
2002-10-31 SPEC Specification 25 View
2002-10-31 CLM Claims 11 View
2002-10-31 ABST Abstract 1 View
2002-10-31 DRW Drawings-only black and white line drawings 5 View
2002-10-31 OATH Oath or Declaration filed 3 View
2002-10-31 WFEE Fee Worksheet (SB06) 1 View
2002-10-31 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/285,161
Filed
2002-10-31
Granted
2004-08-31
Pub. No.
US20040084299A1
Art Unit
1753
PTA
0 days