Method for fabricating connection regions of an integrated circuit, and integrated circuit having connection regions
View Patent ↗A method for fabricating an integrated circuit connection region includes application of a dielectric to an integrated circuit with a connection region, application of a corrodible metalization layer to the dielectric, application of a protection device to the metalization layer, and removal of the protection device in a region around the connection region.
1. A method comprising
providing an integrated circuit having a connection region,
applying a dielectric to the integrated circuit,
applying a metallization layer to the dielectric, the metallization layer being corrodible,
applying a conductive protection device that is wetable by the liquid solder to the metallization layer,
patterning the conductive protection device such that the protection device is removed an area around the connection region; and
oxidizing the metallization layer in the areas around the connection region thereby forming a solder stop device that is not wetable by the liquid solder.
2. The method of claim 1 , further comprising
applying a connection device to the connection region.
3. The method of claim 2 , wherein applying the connection device includes applying a solder ball.
4. The method of claim 1 , further comprising
applying a carrier layer to the dielectric.
5. The method of claim 4 , further comprising selecting
a sputtering process for applying the carrier layer.
6. The method of claim 1 , further comprising
applying an interconnect layer, and applying a barrier device to the dielectric.
7. The method of claim 6 , wherein
applying the interconnect layer comprises electrochemically depositing the interconnect layer.
8. The method of claim 1 , further comprising
patterning the metallization layer before applying the protection device.
9. The method of claim 1 , further comprising
electrochemically depositing the protection device.
10. The method of claim 1 , further comprising
providing a patterned photomask, and
etching the protection device in a region exposed by the photomask.