Method for determining the depth of a buried structure
View Patent ↗The present invention relates to a method for determining the depth of a buried structure in a semiconductor wafer. According to the invention, the layer behavior of the semiconductor wafer which is brought about by the buried structure when the semiconductor wafer is irradiated with electromagnetic radiation in the infrared range and arises as a result of the significantly longer wavelengths of the radiation used in comparison with the lateral dimensions of the buried structure is utilized to determine the depth of the buried structure by spectrometric and/or ellipsometric methods.
1. A method for determining a thickness of a structured layer in a semiconductor wafer, wherein the structured layer has structure elements arranged in a regular pattern, comprising:
irradiating the semiconductor wafer over a large area at a predetermined angle of incidence with respect to a surface of the semiconductor wafer with electromagnetic radiation extending over a wavelength range, wherein the irradiated area comprises a plurality of the structure elements of the structured layer, and the wavelengths of the electromagnetic radiation are substantially greater than lateral dimensions of the structure elements of the structured layer so that the electromagnetic radiation suppresses scattering effects at the structure elements and, thereby, the structured layer appears homogeneous to the electromagnetic radiation with regard to optical properties;
recording the intensity of the reflected radiation depending on a wave number of the wavelength range of the radiated-in electromagnetic radiation at an angle of reflection, corresponding to the angle of incidence, with respect to the surface of the semiconductor wafer; and
determining the thickness of the structured layer from the recorded intensity depending on the wave numbers.
2. The method as claimed in claim 1 , wherein the thickness of the structured layer is determined by a frequency analysis of the intensity.
3. The method as claimed in claim 1 , wherein the thickness of the structured layer is determined by comparing the measured intensity profile with an intensity profile calculated based on a model.
4. The method as claimed in claim 3 , wherein the semiconductor wafer is irradiated with electromagnetic radiation with different polarizations, and, to determine the thickness of the structured layer, a respective state of polarization of the measured intensity is additionally taken into account in the model.
5. The method as claimed in claim 1 , wherein a wavelength modulation is used for irradiating the semiconductor wafer, the wavelength modulation effected with aid of a movable mirror of a Michelson interferometer, and the recording comprising:
recording the intensity of the reflected radiation depending on a position of the movable mirror; and
calculating the intensity of the reflected radiation depending on the wave number by Fourier transformation of the intensity recorded depending on the position of the movable mirror.
6. The method as claimed in claim 1 , wherein a wavelength modulation is used for irradiating the semiconductor wafer, the wavelength modulation effected with aid of a laser that is continuously tuned in the wavelength range.
7. The method as claimed in claim 1 , wherein the wavelengths of the electromagnetic radiation lie in the range of 2 to 20 μm, and the lateral dimensions of the structure elements lie in the region of 100 nm.
8. The method as claimed in claim 1 , wherein the structure elements of the structured layer comprise trench columns.
9. The method as claimed in claim 1 , further comprising determining a depth of an upper trench column of a trench structure for a trench capacitor, wherein the trench structure comprises the upper trench column and a wider lower trench column.
10. The method as claimed in claim 1 , wherein the electromagnetic radiation lies in an infrared range.
11. The method as claimed in claim 1 , wherein the reflected radiation includes radiation reflected from a top surface of the structured layer and radiation reflected from a bottom surface of the structured layer.
12. The method as claimed in claim 1 , wherein the structured layer is positioned on top of a second layer.
13. The method as claimed in claim 12 , wherein the structured layer possesses a first set of optical properties and the second layer possesses a second set of optical properties that is different from the first set of optical properties.
14. The method as claimed in claim 12 , wherein the second layer comprises a plurality of second structure elements arranged in a regular pattern and the wavelengths of the electromagnetic radiation are substantially greater than lateral dimensions of the second structure elements, so that the electromagnetic radiation suppresses scattering effects at the second structure elements of the second structured layer and, thereby, the second layer appears homogeneous to the electromagnetic radiation.
15. The method as claimed in claim 14 , wherein the structured layer possesses a first set of optical properties and the second layer possesses a second set of optical properties that is different from the first set of optical properties.