Integrated circuit package system with protected conductive layers for pads and method of manufacturing thereof
An integrated circuit package system is provided including providing an integrated circuit die having a contact pad, forming a protection cover over the contact pad, forming a passivation layer having a first opening over the protection cover with the first opening exposing the protection cover, developing a conductive layer over the passivation layer, and forming a pad opening in the protection cover for exposing the contact pad.
1. An integrated circuit package system comprising:
an integrated circuit die having a contact pad thereover;
a protection cover over the contact pad for protecting the contact pad;
a passivation layer having a first opening over the protection cover having a pad opening with the contact pad exposed through the passivation layer and the protection cover;
a conductive layer over the passivation layer, the conductive layer partially removed exposing the contact pad; and
an interconnect directly on the contact pad and only adjacent to the protection cover and the passivation layer without direct contact with the passivation layer.
2. The system as claimed in claim 1 further comprising a circuit element over the integrated circuit die.
3. The system as claimed in claim 1 wherein the protection cover has a higher etching selectivity compared to the passivation layer.
4. The system as claimed in claim 1 wherein the protection cover over the contact pad includes the contact pad free of pin holes from galvanic corrosion.
5. The system as claimed in claim 1 further comprising an interconnect attached with the conductive layer and the contact pad exposed in the pad opening.
6. The system as claimed in claim 1 further comprising a first interconnect attached with the conductive layer.
7. The system as claimed in claim 6 wherein the protection cover is comprised of a resistive layer with a lower etching selectivity than the conductive layer.
8. The system as claimed in claim 6 wherein the protection cover is comprised of an insulator layer with a lower etching selectivity than the conductive layer.
9. The system as claimed in claim 6 wherein the protection cover has a higher etching selectivity than the passivation layer.
10. The system as claimed in claim 6 further comprising contact pads over an integrated circuit die and the protection cover over each of the contact pads with a portion of the contact pads not exposed with the pad opening in the protection cover.