Optimized mirror design for optical direct write
View Patent ↗The present invention provides an optimized direct write lithography system using optical mirrors. That is, a maskless lithography system is provided. The maskless direct-write lithography system provided uses an array of mirrors configured to operate in a tilting mode, a piston-displacement mode, or both in combination. The controlled mirror array is used as a substitute for the traditional chrome on glass masks. In order to avoid constraining the system to forming edges of patterns aligned with the array of mirrors, gray-scale techniques are used for subpixel feature placement. The direct-writing of a pattern portion may rely on a single mirror mode or a combination of modes.
1. A maskless lithography system comprising:
a mirror array configured with,
a first plurality of mirrors configured to operate in at least a tilted configuration; and
a second plurality of mirrors configured to operate in at least a piston displacement configuration,
wherein the first and second pluralities of mirrors are configured to each simultaneously operate in both a tilted configuration and a piston displacement configuration,
an illumination source configured for directing electromagnetic waves to the mirror array for imaging on a substrate; and
a stage configured to move the substrate in a raster pattern.
2. The maskless lithography system as recited in claim 1 , wherein selected arrangements of the first and second pluralities of mirrors enable light reflected by the mirror array to facilitate phase differences in the reflected light to be in the range of about 400 degrees to about 600 degrees.
3. The maskless lithography system as recited in claim 1 , wherein a selected arrangement of the first and second pluralities of mirrors enable light reflected by the mirror array to facilitate a phase difference in the reflected light of about 540 degrees.
4. The maskless lithography system as recited in claim 1 , wherein both the first and second pluralities of mirrors include a hinged mirror mounted on a piston displacement mechanism to enable both a tilted configuration and a piston displacement configuration.
5. The maskless lithography system as recited in claim 4 , wherein the hinged mirror mounted on the piston displacement mechanism comprises an edge mounted hinge enabling tilting of the mirror.
6. The maskless lithography system as recited in claim 4 , wherein the piston displacement mechanism comprises an electrostatically actuated piston displacement mechanism enabling piston displacement of the mirror.
7. A maskless lithography system comprising:
a mirror array having a plurality of movable mirrors each having an optically reflective top surface, the top surfaces of the mirrors, when undeflected, define a face plane for the array, the mirror array adapted such that each mirror of said plurality is capable of tilting such that the reflective top surface of the mirror is at an angle to the face plane and said mirror simultaneously accomplish one of elevating and depressing the movable mirror relative to the face plane such that in addition to tilting with respect to the face plane the reflective top surface can also elevate above and depress below the face plane such that said mirror array is configurable to define a predetermined optical reflection pattern;
an illumination source configured for directing electromagnetic waves onto the mirror array such that a reflected signal is produced corresponding to the predetermined optical reflection pattern of the mirror array; and
a stage configured to support a substrate adapted to move the substrate in a raster pattern while the substrate is exposed to the reflected signal.
8. The maskless lithography system as recited in claim 7 , wherein each mirror of the array is mounted on a piston displacement mechanism that further comprises a torsional center mounted hinge enabling tilting of the mirror.
9. The maskless lithography system recited in claim 7 wherein the movable mirrors of the mirror array are about 40 nm square.
10. The maskless lithography system recited in claim 7 wherein the movable mirrors of the mirror array are arranged in a pattern such that selected mirrors are moved to position where they are one of elevated or depressed relative to the face plane and also tilted relative to the face plane such that optical patterns produced by the mirror array have an increased aerial standing wave ratio.