Electrostatic discharge (ESD) protection structure
View Patent ↗A semiconductor device has a substrate with a plurality of active devices formed thereon. A contact pad is formed on the substrate. A solder bump is formed on the contact pad. An electrostatic discharge (ESD) bump electrode is formed on the contact pad. The ESD bump electrode has a tip. The ESD bump electrode is made with gold. A chip carrier substrate has a contact pad metallurgically connected to the solder bump. The chip carrier substrate also has a ground plate. The ground plate is a low impedance ground point. The tip of the ESD bump electrode is separated from the ground plate by a distance according to ESD sensitivity of the active devices. The distance is determined by a ratio of a discharging threshold voltage for ESD sensitivity of the active device to be protected to an atmosphere discharging voltage.
1. A semiconductor device, comprising:
a substrate having a plurality of active devices formed thereon;
a contact pad formed on the substrate;
a solder bump formed on the contact pad of the substrate;
an electrostatic discharge (ESD) bump electrode having a height H formed on the contact pad of the substrate; and
a chip carrier substrate having a contact pad connected to the solder bump, the chip carrier substrate further including a ground plate, wherein the ESD bump electrode is separated from the ground plate by a distance D which is exposed to atmosphere and selected as a ratio of discharging threshold voltage for the active devices to discharging voltage of the atmosphere;
wherein the ESD bump electrode, atmosphere, and ground plate respectively constitute a metal-insulator-metal capacitor having an electric field determined by the distance D which is less than electrostatic energy induced on the contact pad for discharging the electrostatic energy to protect the active devices.
2. The semiconductor device of claim 1 , wherein the ESD bump electrode includes a tip, wire loop, or a metal stick.
3. The semiconductor device of claim 1 , wherein the ESD bump electrode is made with gold.
4. The semiconductor device of claim 1 , wherein the ground plate is a low impedance ground point.
5. The semiconductor device of claim 1 , wherein the height H of the ESD bump electrode ranges from 65 to 85 micrometers with a variation of +/−10 micrometers.
6. The semiconductor device of claim 1 , wherein the ESD bump electrode is formed with stacked bumps to create the distance D.
7. A method of making a semiconductor device, comprising:
providing a substrate having a plurality of active devices formed thereon;
forming a contact pad on the substrate;
forming a solder bump on the contact pad of the substrate;
forming an electrostatic discharge (ESD) bump electrode on the contact pad of the substrate having a height H ranging from 65 to 85 micrometers with a variation of +/−10 micrometers, the ESD bump electrode having a tip; and
providing a chip carrier substrate having a contact pad metallurgically connected to the solder bump, the chip carrier substrate further including a ground plate, wherein the tip of the ESD bump electrode is separated from the ground plate by a distance D which is exposed to atmosphere and selected as a ratio of discharging threshold voltage for the active devices to discharging voltage of the atmosphere;
wherein the ESD bump electrode, atmosphere, and ground plate respectively constitute a metal-insulator-metal capacitor having an electric field determined by the distance D which is less than electrostatic energy induced on the contact pad for discharging the electrostatic energy to protect the active devices.
8. The method of claim 7 , wherein the ESD bump electrode is made with gold.
9. The method of claim 7 , wherein the ground plate is a low impedance ground point.
10. The method of claim 7 , wherein the height H of the ESD bump electrode ranges from 65 to 85 micrometers with a variation of +/−10 micrometers.
11. The method of claim 7 , further including forming the ESD bump electrode with stacked bumps to create the distance D.
12. A method of making a semiconductor device, comprising:
providing a substrate having a plurality of active devices formed thereon;
forming a contact pad on the substrate;
forming a solder bump on the contact pad of the substrate;
forming an electrostatic discharge (ESD) bump electrode on the contact pad of the substrate having a height H; and
providing a chip carrier substrate having a contact pad connected to the solder bump, the chip carrier substrate further including a ground plate, wherein the ESD bump electrode is separated from the ground plate by a distance D which is exposed to atmosphere and selected as a ratio of discharging threshold voltage for the active devices to discharging voltage of the atmosphere;
wherein the ESD bump electrode, atmosphere, and ground plate respectively constitute a metal-insulator-metal capacitor having an electric field determined by the distance D which is less than electrostatic energy induced on the contact pad for discharging the electrostatic energy to protect the active devices.
13. The method of claim 12 , wherein the ESD bump electrode includes a wire loop.
14. The method of claim 12 , wherein the ESD bump electrode includes a metal stick.
15. The method of claim 12 , wherein the ESD bump electrode is made with gold.
16. The method of claim 12 , wherein the ground plate is a low impedance ground point.
17. The method of claim 12 , wherein the height H of the ESD bump electrode ranges from 65 to 85 micrometers with a variation of +/−10 micrometers.
18. The method of claim 12 , further including forming the ESD bump electrode with stacked bumps to create the distance D.
19. A method of making a semiconductor device, comprising:
providing a substrate having a plurality of active devices formed thereon;
forming an interconnect site on the substrate;
forming a contact structure on the interconnect site of the substrate;
forming an electrostatic discharge (ESD) structure between the substrate and the chip carrier substrate, the ESD structure including an ESD bump electrode and ground plate; and
providing a chip carrier substrate having an interconnect site connected to the contact structure, wherein the ESD bump electrode is separated from the ground plate by a distance D which is exposed to atmosphere and selected as a ratio of discharging threshold voltage for the active devices to discharging voltage of the atmosphere;
wherein the ESD bump electrode, atmosphere, and ground plate respectively constitute a metal-insulator-metal capacitor having an electric field determined by the distance D which is less than electrostatic energy induced on the contact pad for discharging the electrostatic energy to protect the active devices.
20. The method of claim 19 , wherein the ESD bump electrode includes a wire loop.
21. The method of claim 19 , wherein the ESD bump electrode includes a metal stick.
22. The method of claim 19 , wherein the ESD bump electrode is made with gold.
23. The method of claim 19 , wherein the ESD bump electrode has a height H ranging from 65 to 85 micrometers with a variation of +/−10 micrometers.
24. The method of claim 19 , further including forming the ESD bump electrode with stacked bumps to create the distance D.