Metal-oxide-semiconductor device having trenched diffusion region and method of forming same
View Patent ↗An MOS device includes a semiconductor layer of a first conductivity type and first and second source/drain regions of a second conductivity type formed in the semiconductor layer proximate an upper surface of the semiconductor layer. The first and second source/drain regions are spaced apart relative to one another. A gate is formed above and electrically isolated from the semiconductor layer, at least partially between the first and second source/drain regions. At least a given one of the first and second source/drain regions is configured having an effective width that is substantially greater than a width of a junction between the semiconductor layer and the given source/drain region.
1. A method comprising the steps of:
forming first and second source/drain regions of a given transistor in a semiconductor layer, the first and second source/drain regions being of a first conductivity type and the semiconductor layer being of a second conductivity type, the first and second source/drain regions being formed proximate an upper surface of the semiconductor layer and spaced apart relative to one another; and
forming a gate of the given transistor above and electrically isolated from the semiconductor layer, the gate being formed at least partially between the first and second source/drain regions;
wherein at least a given one of the first and second source/drain regions of the given transistor is formed having an effective width that is substantially greater than a width of a junction between the semiconductor layer and the given source/drain region; and
wherein the step of forming at least the given source/drain region of the given transistor comprises forming a plurality of trenches within the given transistor in the semiconductor layer proximate the upper surface of the semiconductor layer.
2. The method of claim 1 , wherein the step of forming the trenches comprises reactive ion etching.
3. The method of claim 1 , further comprising controlling a ratio of the effective width of the transistor to the width of the junction between the semiconductor layer and the given source/drain region by controlling a depth of one or more of the trenches in the semiconductor layer.
4. The method of claim 1 , wherein at least a subset of the trenches is formed such that a width of a mesa separating two adjacent trenches is less than or equal to twice a cross-sectional thickness of the given source/drain region, such that the mesa separating the two adjacent trenches is comprised substantially of material of the first conductivity type.
5. The method of claim 1 , wherein the step of forming at least the given source/drain region comprises:
implanting an impurity of the first conductivity type into the semiconductor layer proximate the upper surface of the semiconductor layer, a spacing of the trenches being configured such that at least a portion of the semiconductor layer separating two adjacent trenches is substantially displaced by material of the first conductivity type.
6. The method of claim 1 , wherein the step of forming at least the given source/drain region comprises:
forming a first plurality of trenches in the semiconductor layer proximate the upper surface of the semiconductor layer;
filling the first plurality of trenches with an insulating material such that the insulating material is substantially planar with the upper surface of the semiconductor layer;
forming a second plurality of trenches in the semiconductor layer proximate the upper surface of the semiconductor layer, each of the second plurality of trenches being formed between a corresponding pair of adjacent trenches in the first plurality of trenches; and
doping at least sidewalls and bottom walls of the second plurality of trenches with an impurity of the first conductivity type.
7. The method of claim 1 , wherein the given source/drain region extends across multiple ones of the plurality of trenches.
8. The method of claim 1 , wherein a spacing of the trenches is arranged such that a mesa separating two adjacent trenches within the given source/drain region does not include an active junction between material of the first conductivity type and material of the second conductivity type.
9. The method of claim 8 , wherein the mesa separating the two adjacent trenches comprises any material which remains between the two adjacent trenches after the plurality of trenches are formed.
10. The method of claim 8 , wherein the plurality of trenches is formed such that the two adjacent trenches are separated only by the mesa.
11. The method of claim 1 , wherein a spacing of the trenches is arranged such that a mesa separating two adjacent trenches within the given source/drain region does not include material of the second conductivity type.
12. The method of claim 1 , wherein a mesa separating two adjacent trenches within the given source/drain region does not contain any portion of the gate region.
13. The method of claim 1 , wherein a given one of the plurality of trenches comprises at least a portion of the first source/drain region, at least a portion of the second source/drain region, and at least a portion of the gate region.
14. The method of claim 1 , wherein forming the plurality of trenches comprises using the upper surface of the semiconductor layer as an etch stop.
15. The method of claim 1 , wherein forming the plurality of trenches comprises exposing at least a portion of the upper surface of the semiconductor layer though one or more bottom walls of the plurality of trenches.