High flow piezoelectric pump
View Patent ↗A piezoelectric pump for pumping a fluid at a high flow rate includes a housing and an actuator located within the housing. An electric voltage applied to the actuator causes the actuator to apply a force to a first diaphragm that is proximate to the actuator. A piston assembly is located within the housing and is moveable between at least a first position and a second position. A first fluid chamber is defined by the housing, the first diaphragm, and the piston assembly. A coupling fluid is located within the first fluid chamber for coupling the first diaphragm to the piston assembly. A second fluid chamber is defined by the housing and the piston assembly. An inlet valve is in communication with the second fluid chamber and an outlet valve is in communication with the second fluid chamber.
1. A piezoelectric pump for pumping a fluid, the pump comprising:
a housing;
an actuator located within the housing, wherein an electric voltage applied to the actuator causes the actuator to apply a force;
a first diaphragm proximate to the actuator;
a second diaphragm proximate to the first diaphragm;
a piston assembly located within the housing, the piston assembly moveable between at least a first position and a second position;
a first fluid chamber defined by the housing, the first diaphragm, and the second diaphragm, and wherein the first fluid chamber is sealed from communicating with the piston assembly;
a coupling fluid located within the first fluid chamber for coupling the first diaphragm to the second diaphragm;
a second fluid chamber defined by the housing and the piston assembly;
an inlet valve in communication with the second fluid chamber;
an outlet valve in communication with the second fluid chamber;
wherein the force applied by the actuator displaces the first diaphragm forcing the coupling fluid to move the second diaphragm and the piston assembly from the first position to the second position, and wherein movement of the piston assembly between the first position and the second position changes a volume of the second fluid chamber thereby moving the fluid into the second fluid chamber through the inlet valve and out of the second fluid chamber through the outlet valve.
2. The piezoelectric pump of claim 1 wherein the piston assembly comprises a piston in contact with a third diaphragm, and the second fluid chamber is at least partially defined by the third diaphragm of the piston assembly.
3. The piezoelectric pump of claim 2 wherein the first diaphragm has a surface area greater than a surface area of the second diaphragm, and wherein the third diaphragm has a surface area greater than the surface area of the first diaphragm.
4. The piezoelectric pump of claim 2 wherein the first, second, and third diaphragms are attached to the housing and are flexible.
5. The piezoelectric pump of claim 1 wherein the piston assembly moves along a linear axis between the first position and the second position.
6. The piezoelectric pump of claim 5 wherein the first fluid chamber has a neck portion along the linear axis, the neck portion having a reduced cross-sectional area such that the coupling fluid within the first fluid chamber is forced into the neck portion by the displacement of the first diaphragm, thereby amplifying the displacement of the piston assembly along the linear axis.
7. The piezoelectric pump of claim 1 wherein the actuator comprises at least one piezoelectric material that deforms when the electric voltage is applied to the piezoelectric material.
8. A piezoelectric pump for pumping a fluid, the pump comprising:
a housing;
an actuator located within the housing, wherein an electric voltage applied to the actuator causes the actuator to apply a force;
a first diaphragm proximate to the actuator;
a second diaphragm proximate the first diaphragm;
a third diaphragm proximate the second diaphragm;
a piston located between the second and third diaphragms, the piston moveable between at least a first position and a second position;
a first fluid chamber defined by the housing, the first diaphragm, and the second diaphragm, and wherein the first fluid chamber is sealed from the piston;
a coupling fluid located within the first fluid chamber for coupling the first diaphragm to the second diaphragm;
a second fluid chamber defined by the housing and the third diaphragm;
an inlet valve in communication with the second fluid chamber;
an outlet valve in communication with the second fluid chamber;
wherein the force applied by the actuator displaces the first diaphragm forcing the coupling fluid to displace the second diaphragm, wherein displacement of the second diaphragm moves the piston from the first position to the second position, and wherein movement of the piston between the first position and the second position displaces the third diaphragm thereby changing a volume of the second fluid chamber.
9. The piezoelectric pump of claim 8 wherein the first, second, and third diaphragms are attached to the housing and are flexible.
10. The piezoelectric pump of claim 9 wherein the piston moves along a linear axis between the first position and the second position.
11. The piezoelectric pump of claim 10 wherein the first fluid chamber has a neck portion along the linear axis, the neck portion having a reduced cross-sectional area such that the coupling fluid within the first fluid chamber is forced into the neck portion by the displacement of the first diaphragm, thereby amplifying the displacement of the second diaphragm.
12. The piezoelectric pump of claim 11 wherein the actuator comprises at least one piezoelectric material that deforms when an electric voltage is applied to the piezoelectric material.