Integrated circuit comprising an organic semiconductor, and method for the production of an integrated circuit
An embodiment of the invention provides an integrated circuit having an organic field effect transistor (OFET) with a dielectric layer. The dielectric layer is prepared from a polymer formulation comprising: about 100 parts of at least one crosslinkable base polymer, from about 10 to about 20 parts of at least one di- or tribenzyl alcohol compound as an electrophilic crosslinking component, from about 0.2 to about 10 parts of at least one photo acid generator, and at least one solvent. Another embodiment provides a semiconductor fabrication method. The method comprises applying the polymer formulation to a surface of a substrate, drying the polymer formulation, crosslinking the polymer formulation after drying, and baking the polymer formulation after crosslinking.
1. A structural building block comprising a substrate with a layer, wherein the layer comprises a polymer formulation, the polymer formulation comprising:
about 100 parts by mass of at least one crosslinkable base; polymer selected from the group consisting of poly-4-vinylphenol, poly-4-vinylphenol-co-2-hydroxyethylmethacrylate and poly-4-vinylphenol-co-methylmethacrylate;
from about 10 to about 20 parts by mass of 4 hydroxymethyl-benzyl alcohol as an electrophilic crosslinking component; and
from about 0.2 to about 10 parts by mass of triphenysulfoniumhexaflat as a photo acid generator,
whereby, upon a photoinduced crosslinking reaction, the layer forms a gate dielectric layer of an organic field effect transistor (OFET).
2. The structural building block of claim 1 , wherein the photo acid generator generates a photo acid for transferring a proton to a hydroxyl group of the benzyl alcohol on exposure to UV light.
3. The structural building block of claim 1 , further comprising a solvent comprising a material selected from the group consisting of: n-butanol, propylene glycol monomethyl ether acetate (PGMEA), dioxane, N-methylpyrolidone (NMP), γ-butyrolactone, xylene, and combinations thereof.
4. The structural building block of claim 1 , wherein the crosslinkable base polymer, the electrophilic crosslinking component, and the photo acid generator comprise about 5% to about 20% by mass of the polymer formulation.
5. An organic transistor comprising:
a gate structure disposed on a substrate; and
a dielectric layer disposed over and around the gate structure, the dielectric layer comprising a polymer material, the polymer material comprising
about 100 parts by mass of at least one crosslinkable base polymer selected from the group consisting of poly-4-vinylphenol, poly-4-vinylphenol-co-2-hydroxyethylmethacrylate and poly-4-vinylphenol-co-methylmethacrylate,
from about 10 to 20 parts by mass of 4-hydroxymethyl-benzyl alcohol as an electrophilic crosslinking component, and
from about 0.2 to about 10 parts by mass of triphenysulfoniumhexaflat as a photo acid generator, wherein the base polymer is crosslinked with the electrophilic crosslinking component.
6. The organic transistor of claim 5 , wherein the gate structure comprises Ti.
7. The organic transistor of claim 5 , wherein the substrate comprises polyethylene naphthalate.
8. The organic transistor of claim 5 , further comprising:
a source layer disposed over a first portion of the dielectric layer;
a drain layer disposed over a second portion of the dielectric layer, wherein the first and second portions of the dielectric layer are not electrically connected; and
an active layer disposed between the source and drain layers, the active layer disposed on the dielectric layer.
9. The organic transistor of claim 8 , wherein the source and drain layers comprise Au.
10. The organic transistor of claim 8 , wherein the active layer comprises pentacene.
11. An organic transistor comprising:
a gate structure disposed on a substrate;
a dielectric layer disposed over and around the gate structure, the dielectric layer comprising a polymer formulation, wherein the polymer formulation comprises
about 100 parts by mass of at least one crosslinkable base polymer selected from the group consisting of poly-4-vinylphenol, poly-4-vinylphenol-co-2-hydroxyethylmethacrylate and poly-4-vinylphenol-co-methylmethacrylate,
from about 10 to 20 parts by mass of 4-hydroxymethyl-benzyl alcohol as an electrophilic crosslinking component, and
from about 0.2 to about 10 parts by mass of triphenysulfoniumhexaflat as a photo acid generator;
a source layer disposed over a first portion of the dielectric layer;
a drain layer disposed over a second portion of the dielectric layer, wherein the first and second portions of the dielectric layer are not electrically connected; and
an active layer disposed between the source and drain layers, the active layer disposed on the dielectric layer.
12. The organic transistor of claim 11 , wherein the active layer comprises pentacene, wherein the substrate comprises polyethylene naphthalate, wherein the gate structure comprises Ti, and wherein the source and drain layers comprise Au.