Semiconductor package with semiconductor core structure and method of forming same
View Patent ↗A semiconductor device is made by providing a temporary carrier for supporting the semiconductor device. An integrated passive device (IPD) structure is formed over the temporary carrier. The IPD structure includes an inductor, resistor, and capacitor. Conductive posts are mounted to the IPD structure, and first semiconductor die is mounted to the IPD structure. A wafer molding compound is deposited over the conductive posts and the first semiconductor die. A core structure is mounted to the conductive posts over the first semiconductor die. The core structure includes a semiconductor material. Conductive through silicon vias (TSVs) are formed in the core structure. A redistribution layer (RDL) is formed over the core structure. A second semiconductor die is mounted over the semiconductor device. The second semiconductor die is electrically connected to the core structure.
1. A method of making a semiconductor device, comprising:
providing a temporary carrier for supporting the semiconductor device;
forming an integrated passive device (IPD) structure over the temporary carrier, the IPD structure including an inductor, resistor, or capacitor;
forming a plurality of first conductive posts over the temporary carrier;
mounting a first semiconductor die to the IPD structure with a flipchip interconnect;
depositing a first wafer molding compound over the first conductive posts and first semiconductor die;
bonding a core structure to the first conductive posts over the first semiconductor die, the core structure including a silicon material;
forming conductive through silicon vias (TSVs) in the core structure;
forming a first redistribution layer over the core structure;
forming a plurality of second conductive posts over the core structure;
mounting a second semiconductor die over the semiconductor device with a flipchip interconnect, the second semiconductor die being electrically connected to the core structure;
depositing a second wafer molding compound over the second conductive posts and second semiconductor die; and
forming a second redistribution layer over the second molding compound and second semiconductor die.
2. The method of claim 1 , wherein the first wafer molding compound includes a polymer material having a loss tangent less than 0.01 and having fillers to match a coefficient of thermal expansion of the semiconductor device.
3. The method of claim 1 , including:
removing the temporary carrier; and
connecting an electrical interconnect structure to the semiconductor device.
4. The method of claim 1 , including mounting a dummy die over the IPD structure, the dummy die including a single-crystal material or a multi-crystal wafer material.
5. The method of claim 1 , wherein the first semiconductor die is electrically connected to the IPD structure using conductive interconnects.
6. The method of claim 1 , wherein forming conductive TSVs in the core structure includes:
etching the core structure to form vias; and
depositing a conductive material into the vias to form the conductive TSVs.
7. The method of claim 1 , including backgrinding the core structure to expose the conductive TSVs.
8. A method of making a semiconductor device, comprising:
providing a temporary carrier for supporting the semiconductor device;
forming an integrated passive device (IPD) structure over the temporary carrier;
mounting a first semiconductor die to the IPD structure with a flipchip interconnect;
forming a plurality of first conductive posts over the temporary carrier;
depositing a first molding compound over the first conductive posts and first semiconductor die;
bonding a core structure to the first conductive posts over the first semiconductor die;
forming conductive through silicon vias (TSVs) in the core structure;
forming a plurality of second conductive posts over the core structure;
mounting a second semiconductor die over the semiconductor device, the second semiconductor die being electrically connected to the core structure; and
depositing a second molding compound over the second conductive posts and second semiconductor die.
9. The method of claim 8 , further including:
forming a first redistribution layer over the core structure; and
forming a second redistribution layer over the second molding compound and second semiconductor die.
10. The method of claim 9 , wherein the conductive TSV is electrically connected to the first redistribution layer over the first conductive posts and first semiconductor die.
11. The method of claim 8 , including:
removing the temporary carrier; and
connecting an electrical interconnect structure to the semiconductor device.
12. The method of claim 8 , including mounting a dummy die over the IPD structure, the dummy die including a single-crystal material or a multi-crystal wafer material.
13. The method of claim 8 , wherein the first molding compound includes a polymer material having a loss tangent less than 0.01 and having fillers to match a coefficient of thermal expansion of the semiconductor device.
14. A method of making a semiconductor device, comprising:
providing a carrier;
forming an integrated passive device (IPD) structure over the carrier;
mounting a first semiconductor die to the IPD structure;
forming a plurality of first conductive posts over the IPD structure and outside a footprint of the first semiconductor die;
depositing a first molding compound over the first conductive posts, IPD structure, and first semiconductor die; and
bonding a wafer core structure to the first conductive posts over the first semiconductor die, the wafer core structure having sufficient area to cover the first conductive posts and first semiconductor die.
15. The method of claim 14 , wherein the first molding compound includes a polymer material having a loss tangent less than 0.01 and having fillers to match a coefficient of thermal expansion of the semiconductor device.
16. The method of claim 14 , wherein the first semiconductor die includes a dummy die or active semiconductor die.
17. The method of claim 14 , including backgrinding the wafer core structure to expose the conductive TSVs.
18. The method of claim 14 , further including;
forming a plurality of second conductive posts over the wafer core structure;
mounting a second semiconductor die over the semiconductor device, the second semiconductor die being electrically connected to the wafer core structure; and
depositing a second molding compound over the second conductive posts and second semiconductor die.
19. A method of making a semiconductor device, comprising:
providing a carrier;
forming an integrated passive device (IPD) structure over the carrier;
mounting a first semiconductor die to the IPD structure;
forming a plurality of first conductive posts over the IPD structure away from the first semiconductor die;
depositing a first molding compound over the first conductive posts and first semiconductor die; and
bonding a wafer core to the first conductive posts over the first semiconductor die, the wafer core having sufficient area to cover the first conductive posts and first semiconductor die.
20. The method of claim 19 , further including:
forming conductive through silicon vias (TSVs) in the wafer core;
forming a plurality of second conductive posts over the wafer core;
mounting a second semiconductor die over the semiconductor device, the second semiconductor die being electrically connected to the wafer core; and
depositing a second molding compound over the second conductive posts and second semiconductor die.
21. The method of claim 19 , wherein the first molding compound includes a polymer material having a loss tangent less than 0.01 and having fillers to match a coefficient of thermal expansion of the semiconductor device.
22. The method of claim 19 , further including backgrinding the wafer core to expose the conductive TSVs.
23. The method of claim 19 , including:
removing the temporary carrier; and
connecting an electrical interconnect structure to the semiconductor device.