Integrated circuit packaging system with a shield and method of manufacture thereof
View Patent ↗A method of manufacture of an integrated circuit packaging system includes: providing a substrate; mounting a first integrated circuit over the substrate; forming an encapsulant around the first integrated circuit and over the substrate; and forming a shield structure within and over the encapsulant while simultaneously forming a vertical interconnect structure.
1. A method of manufacture of an integrated circuit packaging system comprising:
providing a substrate;
mounting a first integrated circuit over the substrate;
forming a ground ring pad on a first side of the substrate and adjacent to the first integrated circuit;
forming a conductive pad on a periphery of the substrate, the ground ring pad between the conductive pad and the first integrated circuit;
forming an encapsulant around the first integrated circuit and over the substrate; and
forming a shield structure within and over the encapsulant while simultaneously forming a vertical interconnect structure, the shield structure in direct contact with the first integrated circuit and the shield structure is a continuous structure characteristic of a deposition process.
2. The method as claimed in claim 1 wherein:
forming the shield structure includes forming a protrusion.
3. The method as claimed in claim 1 wherein:
forming the ground pad continuously around the first integrated circuit and contacting the shield structure.
4. The method as claimed in claim 1 further comprising:
forming a via within the first integrated circuit for dissipating heat to the shield structure.
5. The method as claimed in claim 1 further comprising:
stacking a second integrated circuit over the first integrated circuit.
6. A method of manufacture of an integrated circuit packaging system comprising:
providing a substrate;
mounting a first integrated circuit over the substrate;
forming a ground ring pad on a first side of the substrate and adjacent to the first integrated circuit;
forming a conductive pad on a periphery of the substrate, the ground ring pad between the conductive pad and the first integrated circuit;
forming an encapsulant around the first integrated circuit and over the substrate with openings;
forming a shield structure within and over the encapsulant while simultaneously forming a vertical interconnect structure, the shield structure in direct contact with the first integrated circuit and the shield structure is a continuous structure characteristic of a deposition process; and
patterning the shield structure and the vertical interconnect structure to form a shield and a vertical interconnect.
7. The method as claimed in claim 6 wherein:
forming the ground pad non-continuously around the first integrated circuit and contacting the shield.
8. The method as claimed in claim 6 further comprising:
forming a redistribution layer between two of the vertical interconnects.
9. The method as claimed in claim 6 wherein:
forming the shield includes forming an electromagnetic interference shield.
10. The method as claimed in claim 6 wherein:
mounting the first integrated circuit includes forming a flip-chip device or a wire-bonded device.
11. An integrated circuit packaging system comprising:
a substrate;
a first integrated circuit over the substrate;
a ground ring pad on a first side of the substrate and adjacent to the first integrated circuit;
a conductive pad on a periphery of the substrate, the ground ring pad between the conductive pad and the first integrated circuit;
an encapsulant around the first integrated circuit and over the substrate with openings that expose the ground ring pad and the conductive pad; and
a shield within and over the encapsulant in contact with the ground ring pad, the shield in direct contact with the first integrated circuit and the shield is a continuous structure characteristic of a deposition process; and
a vertical interconnect within the encapsulant and in contact with the conductive pad.
12. The system as claimed in claim 11 wherein:
the shield includes a protrusion.
13. The system as claimed in claim 11 wherein:
the ground ring pad is configured continuously around the first integrated circuit.
14. The system as claimed in claim 11 further comprising:
a via within the first integrated circuit for dissipating heat to the shield.
15. The system as claimed in claim 11 wherein:
the ground ring pad is configured discontinuously around the first integrated circuit.
16. The system as claimed in claim 11 further comprising:
a second integrated circuit stacked over the first integrated circuit.
17. The system as claimed in claim 16 further comprising:
a redistribution layer between two of the vertical interconnects.
18. The system as claimed in claim 16 wherein:
the shield and the vertical interconnect include the same material.
19. The system as claimed in claim 16 wherein:
the shield includes an electromagnetic interference shield.
20. The system as claimed in claim 16 wherein:
the first integrated circuit includes a flip-chip device or a wire-bonded device.