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App. No. 12/969,852 · Confirmation No. 5024

INTEGRATION OF SHALLOW TRENCH ISOLATION AND THROUGH-SUBSTRATE VIAS INTO INTEGRATED CIRCUIT DESIGNS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Quick Facts
App. No.
12/969,852
Filed
2010-12-16
Granted
2014-06-03
Pub. No.
US20120153430A1
Art Unit
2823
PTA
-43 days