IP Library Granted Patent US 9,275,877
Granted Patent B2
US 9,275,877 · App. 13/236,952 · Granted Mar 1, 2016

Semiconductor device and method of forming semiconductor package using panel form carrier

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Quick Facts
Patent No.
US 9,275,877
App. No.
13/236,952
Granted
Mar 1, 2016
Kind
B2
Abstract

A semiconductor device has a first insulating layer formed over a carrier. A first conductive layer is formed over the first insulating layer. A second insulating layer is formed over the first conductive layer. Vias are formed through the second insulating layer. A second conductive layer is formed over the second insulating layer and extends into the vias. A semiconductor die is mounted to the second conductive layer. A bond wire is formed between a contact pad on the semiconductor die and the second conductive layer. The second conductive layer extends to a mounting site of the semiconductor die to minimize the bond wire span. An encapsulant is deposited over the semiconductor die. A portion of the first insulating layer is removed to expose the second conductive layer. A portion of the first conductive layer is removed to electrically isolate remaining portions of the first conductive layer.

Claims (58)

1. A method of making a semiconductor device, comprising:

providing an insulating layer;

forming a first conductive layer over the insulating layer;

forming a second conductive layer over a first surface of the first conductive layer extending from a peripheral region of the semiconductor device to a die mounting site;

disposing a first semiconductor die over the first surface of the first conductive layer at the die mounting site;

forming a bond wire between a contact pad on the first semiconductor die and the second conductive layer;

depositing a first encapsulant over the first semiconductor die;

forming an opening in the insulating layer over a second surface of the first conductive layer opposite the first surface of the first conductive layer; and

removing a portion of the first conductive layer within the opening in the insulating layer.

2. The method of claim 1 , wherein a portion of the second conductive layer extends over the first semiconductor die.

3. The method of claim 1 , further including depositing a second encapsulant over the first encapsulant.

4. The method of claim 1 , further including retaining a portion of the first conductive layer over the semiconductor die for heat dissipation.

5. The method of claim 1 , further including disposing a second semiconductor die over the first semiconductor die prior to depositing the first encapsulant.

6. The method of claim 1 , further including disposing a discrete device over the second conductive layer prior to depositing the first encapsulant.

7. A method of making a semiconductor device, comprising:

forming a first insulating layer;

forming a first conductive layer over the first insulating layer;

disposing a first semiconductor die over the first conductive layer;

depositing an encapsulant over the first semiconductor die;

forming an opening in the first insulating layer over the first conductive layer; and

removing a portion of the first conductive layer within the opening in the first insulating layer.

8. The method of claim 7 , further including:

forming a second insulating layer over the first conductive layer;

forming a plurality of vias through the second insulating layer; and

forming a second conductive layer over the second insulating layer and extending into the vias.

9. The method of claim 8 , wherein the second conductive layer extends to a mounting site of the first semiconductor die.

10. The method of claim 7 , further including disposing a second semiconductor die over the first semiconductor die prior to depositing the encapsulant.

11. The method of claim 7 , further including:

forming a second conductive layer over the first insulating layer;

disposing a second semiconductor die over the first semiconductor die prior to depositing the encapsulant; and

forming a bond wire between contact pads on the second semiconductor die and the second conductive layer.

12. The method of claim 7 , further including disposing a second semiconductor die over the first semiconductor die.

13. The method of claim 7 , further including:

forming a second conductive layer over the first insulating layer; and

disposing a discrete device over the second conductive layer prior to depositing the encapsulant.

14. A method of making a semiconductor device, comprising:

forming a first conductive layer;

forming an insulating layer over the first conductive layer;

forming a plurality of vias through the insulating layer;

forming a second conductive layer over the insulating layer and extending into the vias to the first conductive layer;

disposing a first semiconductor die over the first conductive layer including a contact pad of the first semiconductor die electrically connected to the second conductive layer; and

removing a portion of the first conductive layer to separate a first segment of the first conductive layer from a second segment of the first conductive layer after forming the insulating layer.

15. The method of claim 14 , further including forming a bond wire between the contact pad of the first semiconductor die and the second conductive layer.

16. The method of claim 14 , further including forming a bump over the contact pad of the first semiconductor die to electrically connect the first semiconductor die to the second conductive layer.

17. The method of claim 14 , further including depositing an encapsulant over the first semiconductor die.

18. The method of claim 17 , further including disposing a second semiconductor die over the first semiconductor die prior to depositing the encapsulant.

19. The method of claim 18 , further including forming a bond wire between contact pads on the second semiconductor die and the second conductive layer.

20. The method of claim 17 , further including disposing a discrete device over the second conductive layer prior to depositing the encapsulant.

21. A method of making a semiconductor device, comprising:

providing a first conductive layer;

forming a second conductive layer over the first conductive layer extending from a peripheral region of the semiconductor device to a die mounting site; and

disposing a first semiconductor die over a first surface of the first conductive layer at the die mounting site including a contact pad of the first semiconductor die electrically connected to the first conductive layer.

22. The method of claim 21 , further including:

forming an insulating layer including a plurality of vias; and

forming the second conductive layer over the insulating layer and extending into the vias.

23. The method of claim 21 , further including depositing an encapsulant over the first semiconductor die.

24. The method of claim 23 , further including disposing a discrete device over the first conductive layer prior to depositing the encapsulant.

25. The method of claim 21 , further including disposing a second semiconductor die over the first semiconductor die.

Assignments (5)
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE'S NAME ON COVERSHEET FROM "STATS CHIPPAC PTE. LTE." TO "STATS CHIPPAC PTE. LTD." PREVIOUSLY RECORDED ON REEL 038378 FRAME 0418. ASSIGNOR(S) HEREBY CONFIRMS THE CHANGE OF NAME. Recorded Sep 5, 2023
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTD.
Reel/Frame 064908/0920 →
RELEASE OF SECURITY INTEREST Recorded Jun 17, 2020
From: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
To: STATS CHIPPAC, INC.; STATS CHIPPAC PTE. LTD. FORMERLY KNOWN AS STATS CHIPPAC LTD.
Reel/Frame 053511/0298 →
CHANGE OF NAME Recorded Apr 7, 2016
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTE.
Reel/Frame 038378/0418 →
SECURITY INTEREST Recorded Aug 6, 2015
From: STATS CHIPPAC, INC.; STATS CHIPPAC LTD.
To: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
Reel/Frame 036288/0748 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 20, 2011
From: LIN, YAOJIAN; HUANG, RUI; KUAN, HEAP HOE; CHOW, SENG GUAN
To: STATS CHIPPAC, LTD.
Reel/Frame 026934/0056 →