Semiconductor device and method of forming protection and support structure for conductive interconnect structure
A semiconductor device has a semiconductor wafer with a plurality of contact pads. A first insulating layer is formed over the semiconductor wafer and contact pads. A portion of the first insulating layer is removed, exposing a first portion of the contact pads, while leaving a second portion of the contact pads covered. An under bump metallization layer and a plurality of bumps is formed over the contact pads and the first insulating layer. A second insulating layer is formed over the first insulating layer, a sidewall of the under bump metallization layer, sidewall of the bumps, and upper surface of the bumps. A portion of the second insulating layer covering the upper surface of the bumps is removed, but the second insulating layer is maintained over the sidewall of the bumps and the sidewall of the under bump metallization layer.
1. A method of making a semiconductor device, comprising:
providing a semiconductor wafer including a plurality of contact pads;
forming a first insulating layer over the semiconductor wafer and contact pads;
forming an under bump metallization layer over the contact pads and the first insulating layer;
forming a plurality of bumps over the under bump metallization layer;
forming a second insulating layer over the semiconductor wafer to completely cover the first insulating layer, a sidewall of the under bump metallization layer, sidewall of the bumps, and upper surface of the bumps;
etching the second insulating layer to remove a portion of the second insulating layer covering the upper surface of the bumps and a first portion of the sidewall of the bumps, while maintaining coverage of the second insulating layer over a second portion of the sidewall of the bumps and the sidewall of the under bump metallization layer to provide structural support for the bumps and form an area over the second insulating layer and between the bumps devoid of material; and
singulating the semiconductor wafer with the area over the second insulating layer and between the bumps devoid of material.
2. The method of claim 1 , wherein after removing the portion of the second insulating layer a thickness of the second insulating layer at the sidewall of the bumps is greater than one fourth of a height of the bumps.
3. The method of claim 1 , wherein removing the portion of the second insulating layer further includes removing the second insulating layer from over a surface of the first insulating layer outside a footprint of the bumps.
4. The method of claim 1 , wherein forming the bumps includes forming cylindrical bumps.
5. The method of claim 1 , wherein forming the bumps includes forming bumps with a rectangular cross-section.
6. The method of claim 1 , wherein removing the portion of the second insulating layer leaves a sloped surface of the second insulating layer around the bumps.
7. The method of claim 1 , wherein removing the portion of the second insulating layer includes reducing a thickness of the second insulating layer.