Semiconductor device and method of forming prefabricated heat spreader frame with embedded semiconductor die
A semiconductor device is made by mounting a prefabricated heat spreader frame over a temporary substrate. The heat spreader frame includes vertical bodies over a flat plate. A semiconductor die is mounted to the heat spreader frame for thermal dissipation. An encapsulant is deposited around the vertical bodies and semiconductor die while leaving contact pads on the semiconductor die exposed. The encapsulant can be deposited using a wafer level direct/top gate molding process or wafer level film assist molding process. An interconnect structure is formed over the semiconductor die. The interconnect structure includes a first conductive layer formed over the semiconductor die, an insulating layer formed over the first conductive layer, and a second conductive layer formed over the first conductive layer and insulating layer. The temporary substrate is removed, dicing tape is applied to the heat spreader frame, and the semiconductor die is singulated.
1. A method of making a semiconductor device, comprising:
providing a heat spreader frame including,
(a) a flat plate,
(b) a first body and a second body extending perpendicularly from a first surface of the flat plate, and
(c) a die mounting site located over the flat plate between the first body and the second body;
disposing a semiconductor die over the die mounting site of the heat spreader frame;
depositing an encapsulant over the die mounting site including a first surface of the encapsulant coplanar with a first surface of the semiconductor die and a second surface of the encapsulant opposite the first surface of the encapsulant coplanar with the first surface of the flat plate; and
forming a first conductive layer over and contacting the first surface of the semiconductor die and the first surface of the encapsulant without forming the first conductive layer over the first body and the second body.
2. The method of claim 1 , further including depositing the encapsulant using a wafer level direct/top gate molding process.
3. The method of claim 1 , further including depositing the encapsulant using a wafer level film assist molding process.
4. The method of claim 1 , further including:
forming an insulating layer over the first conductive layer; and
forming a second conductive layer over the insulating layer.
5. The method of claim 1 , further including singulating the heat spreader frame to separate the semiconductor die.
6. A method of making a semiconductor device, comprising:
providing a heat spreader frame including,
(a) a flat plate,
(b) a first body and a second body extending perpendicularly from a first surface of the flat plate, and
(c) a die mounting site located over the flat plate between the first body and the second body;
disposing a semiconductor die over the die mounting site of the heat spreader frame;
depositing an encapsulant over the die mounting site including a first surface of the encapsulant coplanar with a first surface of the semiconductor die and a second surface of the encapsulant opposite the first surface of the encapsulant coplanar with the first surface of the flat plate; and
conformally forming a first conductive layer over a contact pad of the semiconductor die and across the first surface of the semiconductor die and contacting the coplanar first surface of the encapsulant.
7. The method of claim 6 , further including depositing the encapsulant between the semiconductor die and the heat spreader frame.
8. The method of claim 7 , further including depositing the encapsulant using a wafer level direct/top gate molding process.
9. The method of claim 7 , further including depositing the encapsulant using a wafer level film assist molding process.
10. The method of claim 6 , further including forming an interconnect structure over the semiconductor die by:
forming an insulating layer over the first conductive layer; and
forming a second conductive layer over the insulating layer.
11. The method of claim 6 , further including singulating the heat spreader frame to separate the semiconductor die.
12. A semiconductor device, comprising:
a heat spreader frame including,
(a) a flat plate,
(b) a first body and a second body extending perpendicularly from a first surface of the flat plate, and
(c) a die mounting site located over the flat plate between the first body and the second body;
a semiconductor die disposed over the die mounting site of the heat spreader frame including a first surface of the semiconductor die coplanar with a first surface of the first body and a first surface of the second body;
an encapsulant deposited over the die mounting site including a first surface of the encapsulant coplanar with the first surface of the semiconductor die and a second surface of the encapsulant opposite the first surface of the encapsulant coplanar with the first surface of the flat plate; and
a conductive layer formed over and contacting a contact pad of the semiconductor die and across the first surface of the semiconductor die and contacting the coplanar first surface of the encapsulant, the conductive layer being planar from the contact pad to an interface between the semiconductor die and encapsulant.
13. The semiconductor device of claim 12 , further including an insulating layer formed over the conductive layer.
14. The semiconductor device of claim 12 , further including a bump formed over the conductive layer.
15. The semiconductor device of claim 12 , further including a die attach adhesive disposed between the semiconductor die and the heat spreader frame.
16. A semiconductor device, comprising:
a heat spreader frame including,
(a) a flat plate,
(b) a first body and a second body extending perpendicularly from a first surface of the flat plate, and
(c) a die mounting site located over the flat plate between the first body and the second body;
a semiconductor die disposed over the die mounting site of the heat spreader frame;
an encapsulant deposited over the die mounting site including a first surface of the encapsulant coplanar with a first surface of the semiconductor die and a second surface of the encapsulant opposite the first surface coplanar with the first surface of the flat plate; and
a conductive layer formed over and contacting the first surface of the semiconductor die and the first surface of the encapsulant without being formed over the first body and the second body.
17. The semiconductor device of claim 16 , wherein the encapsulant is deposited between the semiconductor die and the heat spreader frame.
18. The semiconductor device of claim 16 , further including an insulating layer formed over the conductive layer.
19. The semiconductor device of claim 16 , further including a bump formed over the conductive layer.
20. A semiconductor device, comprising:
a heat spreader frame including,
(a) a flat plate,
(b) a first body and a second body extending perpendicularly from a first surface of the flat plate, and
(c) a die mounting site located over the flat plate between the first body and the second body;
a semiconductor die disposed over the die mounting site of the heat spreader frame;
an encapsulant deposited over the die mounting site including a first surface of the encapsulant coplanar with the first surface of the semiconductor die and a second surface of the encapsulant opposite the first surface of the encapsulant coplanar with the first surface of the flat plate; and
a conductive layer conformally formed over a contact pad of the semiconductor die and across the first surface of the semiconductor die and contacting the coplanar first surface of the encapsulant.
21. The semiconductor device of claim 20 , wherein the encapsulant is deposited between the semiconductor die and the first body.
22. The semiconductor device of claim 20 , further including an insulating layer formed over the conductive layer.
23. The semiconductor device of claim 20 , further including a bump formed over the conductive layer.