Semiconductor device and method of forming through vias with reflowed conductive material
A semiconductor device is made by providing a first semiconductor wafer having semiconductor die. A gap is made between the semiconductor die. An insulating material is deposited in the gap. A portion of the insulating material is removed to form a first through hole via (THV). A conductive lining is conformally deposited in the first THV. A solder material is disposed above the conductive lining of the first THV. A second semiconductor wafer having semiconductor die is disposed over the first wafer. A second THV is formed in a gap between the die of the second wafer. A conductive lining is conformally deposited in the second THV. A solder material is disposed above the second THV. The second THV is aligned to the first THV. The solder material is reflowed to form the conductive vias within the gap. The gap is singulated to separate the semiconductor die.
1. A method of making a semiconductor device, comprising:
providing a first wafer including a plurality of first semiconductor dice;
forming an insulating layer in a gap between the first semiconductor dice;
disposing a second wafer including a plurality of second semiconductor dice over the insulating layer;
forming a first conductive layer through the first and second wafers in the insulating layer after disposing the second wafer over the insulating layer to electrically connect the first and second semiconductor dice; and
singulating the first semiconductor dice through the insulating layer.
2. The method of claim 1 , wherein forming the first conductive layer further includes forming a conductive via in a peripheral region of the first and second semiconductor dice.
3. The method of claim 1 , further including forming a second conductive layer over the second wafer, the second conductive layer electrically connected to the first conductive layer.
4. The method of claim 1 , wherein providing the second wafer further includes disposing an insulating material between adjacent second semiconductor dice.
5. The method of claim 1 , further including singulating through the first and second wafers to form a stacked semiconductor package.
6. A method of making a semiconductor device, comprising:
providing a first wafer including a first semiconductor die;
disposing a first insulating material in a peripheral region outside a first footprint of the first semiconductor die;
forming a first conductive layer over the first semiconductor die and extending to the peripheral region;
providing a second wafer including a second semiconductor die;
disposing a second insulating material in a peripheral region outside a second footprint of the second semiconductor die;
disposing the second wafer over the first wafer;
forming a conductive via over the conductive layer and continuously through the first insulating material and second insulating material after disposing the second wafer over the first wafer; and
singulating the first and second wafers through the first and second insulating material.
7. The method of claim 6 , further including forming an insulating layer between the first and second wafers.
8. The method of claim 6 , further including forming a bump over the second wafer prior to singulating through the first and second wafers.
9. The method of claim 6 , further including forming a build-up interconnect structure over the first wafer.
10. A semiconductor device, comprising:
a first wafer including a first semiconductor die;
a conductive layer formed over the first wafer;
a second wafer including a second semiconductor die disposed over the conductive layer; and
a conductive via formed over the second wafer and through the first and second wafers, the conductive via including a surface coplanar with a surface of the first semiconductor die.
11. The semiconductor device of claim 10 , further including a first insulating material deposited in a peripheral region of the first semiconductor die.
12. The semiconductor device of claim 11 , further including a second insulating material deposited in a peripheral region of the second semiconductor die.
13. The semiconductor device of claim 12 , wherein the second wafer is disposed over the first wafer such that the first and second insulating materials are aligned.
14. The semiconductor device of claim 10 , further including an insulating layer formed over the first wafer.
15. A semiconductor device, comprising:
a first wafer including a first semiconductor die and a first insulating material disposed adjacent to the first semiconductor die;
a second wafer including a second semiconductor die and a second insulating material disposed adjacent to the second semiconductor die disposed over the first wafer; and
a conductive layer formed over the second wafer and through the first insulating material adjacent to the first semiconductor die, the conductive layer including a portion disposed adjacent to a side surface of the first semiconductor die.
16. The semiconductor device of claim 15 , wherein the first wafer includes a plurality of first semiconductor die separated by the first insulating material.
17. The semiconductor device of claim 15 , further including a build-up interconnect structure formed over the first wafer.
18. The semiconductor device of claim 15 , further including a bump formed over the second wafer.
19. The semiconductor device of claim 15 , wherein the first insulating material is a molding compound.
20. The semiconductor device of claim 19 , wherein the second insulating material is a molding compound.