Net-voltage-aware optical proximity correction (OPC)
Various embodiments include computer-implemented methods, computer program products and systems for verifying an integrated circuit (IC) layout. In some cases, approaches include a computer-implemented method of verifying an IC layout, the method including: obtaining data about a process variation band for at least one physical feature in the IC layout; determining voltage-based process variation band thresholds for the at least one physical feature in the IC layout; determining whether the process variation band for the at least one physical feature in the IC layout meets design specifications for the IC layout based upon the voltage-based process variation band thresholds for the at least one physical feature in the IC layout; and modifying the IC layout in response to a determination that the process variation band for the at least one physical feature does not meet the design specifications.
1. A computer-implemented method, performed on at least one computing device, of verifying an integrated circuit (IC) layout, the method comprising:
obtaining data about a process variation band for at least one physical feature in the IC layout;
determining electrical voltage-based process variation band thresholds for the at least one physical feature in the IC layout;
determining whether the process variation band for the at least one physical feature in the IC layout meets design specifications for the IC layout based upon the voltage-based process variation band thresholds for the at least one physical feature in the IC layout; and
modifying the IC layout in response to a determination that the process variation band for the at least one physical feature does not meet the design specifications.
2. The computer-implemented method of claim 1 , wherein the process variation band includes a process variation range having an inner width calculation and an outer space calculation for the at least one physical feature.
3. The computer-implemented method of claim 1 , wherein the voltage-based process variation band thresholds for the at least one physical feature include an inner voltage threshold for the at least one physical feature and an outer voltage threshold for the at least one physical feature.
4. The computer-implemented method of claim 3 , wherein the determining of the electrical voltage-based process variation band thresholds for the at least one physical feature in the IC layout includes utilizing a cost function according to the following:
∑
i
[
PV
thresh
,
in
(
V
net
)
-
PV
in
,
i
]
+
∑
j
[
PV
thresh
,
out
(
V
net
)
-
PV
out
,
j
]
wherein V net =net voltage for the at least one physical feature; PV thresh, in =process variation inner threshold; PV thresh, out =process variation outer threshold; PV in,i =inner process variation; and PV out,j =outer process variation.
5. The computer-implemented method of claim 3 , wherein the inner voltage threshold is determined based upon a mean time to failure model.
6. The computer-implemented method of claim 3 , wherein the outer voltage threshold is determined based upon a target failure time model.
7. The computer-implemented method of claim 1 , wherein the determining of the voltage-based process variation band thresholds includes determining: a width of the at least one physical feature, a spacing between the at least one physical feature and an adjacent physical feature, a net voltage of the at least one physical feature, and a net voltage of the adjacent physical feature.
8. A system comprising:
at least one computing device configured to verify an integrated circuit (IC) layout by performing actions including:
obtaining data about a process variation band for at least one physical feature in the IC layout;
determining voltage-based process variation band thresholds for the at least one physical feature in the IC layout;
determining whether the process variation band for the at least one physical feature in the IC layout meets design specifications for the IC layout based upon the voltage-based process variation band thresholds for the at least one physical feature in the IC layout; and
modifying the IC layout in response to a determination that the process variation band for the at least one physical feature does not meet the design specifications.
9. The system of claim 8 , wherein the voltage-based process variation band thresholds for the at least one physical feature include an inner voltage threshold for the at least one physical feature and an outer voltage threshold for the at least one physical feature.
10. The system of claim 9 , wherein the determining of the electrical voltage-based process variation band thresholds for the at least one physical feature in the IC layout includes utilizing a cost function according to the following:
∑
i
[
PV
thresh
,
i
n
(
V
net
)
-
PV
i
n
,
i
]
+
∑
j
[
PV
thresh
,
out
(
V
net
)
-
PV
out
,
j
]
wherein V net =net voltage for the at least one physical feature; PV thresh, in =process variation inner threshold; PV thresh, out =process variation outer threshold; PV in,i =inner process variation; and PV out,j =outer process variation.
11. The system of claim 9 , wherein the inner voltage threshold is determined based upon a mean time to failure model.
12. The system of claim 9 , wherein the outer voltage threshold is determined based upon a target failure time model.
13. The system of claim 8 , wherein the determining of the voltage-based process variation band thresholds includes determining: a width of the at least one physical feature, a spacing between the at least one physical feature and an adjacent physical feature, a net voltage of the at least one physical feature, and a net voltage of the adjacent physical feature.
14. A computer program product comprising program code stored on a non-transitory computer readable storage medium, which when executed by at least one computing device, causes the at least one computing device to verify an integrated circuit (IC) layout by performing actions including:
obtaining data about a process variation band for at least one physical feature in the IC layout;
determining voltage-based process variation band thresholds for the at least one physical feature in the IC layout;
determining whether the process variation band for the at least one physical feature in the IC layout meets design specifications for the IC layout based upon the voltage-based process variation band thresholds for the at least one physical feature in the IC layout; and
modifying the IC layout in response to a determination that the process variation band for the at least one physical feature does not meet the design specifications.
15. The computer program product of claim 14 , wherein the voltage-based process variation band thresholds for the at least one physical feature include an voltage inner threshold for the at least one physical feature and an outer voltage threshold for the at least one physical feature.
16. The computer program product of claim 15 , wherein the determining of the electrical voltage-based process variation band thresholds for the at least one physical feature in the IC layout includes utilizing a cost function according to the following:
∑
i
[
PV
thresh
,
in
(
V
net
)
-
PV
in
,
i
]
+
∑
j
[
PV
thresh
,
out
(
V
net
)
-
PV
out
,
j
]
wherein V net =net voltage for the at least one physical feature; PV thresh, in =process variation inner threshold; PV thresh, out =process variation outer threshold; PV in,i =inner process variation; and PV out,j =outer process variation.
17. The computer program product of claim 14 , wherein the inner voltage threshold is determined based upon a mean time to failure model.
18. The computer program product of claim 14 , wherein the outer voltage threshold is determined based upon a target failure time model.
19. The computer program product of claim 14 , wherein the determining of the voltage-based process variation band thresholds includes determining: a width of the at least one physical feature, a spacing between the at least one physical feature and an adjacent physical feature, a net voltage of the at least one physical feature, and a net voltage of the adjacent physical feature.