Semiconductor device and related fabrication methods
View Patent ↗Semiconductor device structures and related fabrication methods are provided. An exemplary semiconductor device structure includes a body well region having a first conductivity type, a drift region and a source region each having a second conductivity type, where a channel portion of the body well region resides laterally between the source region and a first portion of the drift region that is adjacent to the channel portion. A gate structure overlies the channel portion and the adjacent portion of the drift region. A portion of the gate structure overlying the channel portion proximate the source region has the second conductivity type. Another portion of the gate structure that overlies the adjacent portion of the drift region has a different doping, and overlaps at least a portion of the channel portion, with the threshold voltage associated with the gate structure being influenced by the amount of overlap.
1. A semiconductor device structure comprising:
a body well region of semiconductor material having a first conductivity type;
a drift region of semiconductor material having a second conductivity type;
a source region of semiconductor material having the second conductivity type, a channel portion of the body well region residing laterally between the source region and a first portion of the drift region, the first portion being adjacent to the channel portion; and
a gate structure overlying at least the channel portion of the body well region and the first portion of the drift region, wherein
a second portion of the gate structure overlying the channel portion proximate the source region has the second conductivity type,
a throttling portion of the gate structure overlies the first portion of the drift region and at least a portion of the channel portion,
a doping of the throttling portion is different from the second portion of the gate structure, and
a width of an area of the throttling portion that overlaps the channel portion is less than a width of the gate structure.
2. The semiconductor device structure of claim 1 , wherein a length of the area of the throttling portion that overlaps the channel portion is less than a length of the gate structure.
3. The semiconductor device structure of claim 1 , wherein a dopant concentration of the body well region is greater than 1×10 16 /cm 3 .
4. The semiconductor device structure of claim 3 , wherein a dopant concentration of the drift region is less than 1×10 17 /cm 3 .
5. The semiconductor device structure of claim 1 , further comprising an epitaxial region of semiconductor material having the first conductivity type, wherein:
the epitaxial region underlies the body well region and the drift region; and
a dopant concentration of the epitaxial region is less than a dopant concentration of the body well region.
6. The semiconductor device structure of claim 1 , further comprising a drain region of semiconductor material within the drift region, the drain region having the second conductivity type, wherein:
a dopant concentration of the drain region is greater than a dopant concentration of the drift region; and
the first portion of the drift region resides laterally between the drain region and the channel portion.
7. The semiconductor device structure of claim 6 , further comprising an isolation region of dielectric material, the isolation region residing laterally between the drain region and the first portion of the drift region, wherein the throttling portion of the gate structure overlies at least a portion of the isolation region.
8. The semiconductor device structure of claim 1 , wherein:
a threshold voltage associated with the gate structure is influenced by the throttling portion overlapping the channel portion; and
the threshold voltage is nonuniform with respect to a width of the gate structure.
9. A semiconductor device structure comprising:
a body well region of semiconductor material having a first conductivity type;
a drift region of semiconductor material having a second conductivity type;
a source region of semiconductor material having the second conductivity type, a channel portion of the body well region residing laterally between the source region and a first portion of the drift region, the first portion being adjacent to the channel portion; and
a gate structure overlying at least the channel portion of the body well region and the first portion of the drift region, wherein
a second portion of the gate structure overlying the channel portion proximate the source region has the second conductivity type,
a throttling portion of the gate structure overlies the first portion of the drift region and at least a portion of the channel portion,
a doping of the throttling portion is different from the second portion of the gate structure, and
a width of an area of the throttling portion varies along a length of the gate structure.
10. A semiconductor device structure comprising:
a body well region of semiconductor material having a first conductivity type;
a drift region of semiconductor material having a second conductivity type;
a source region of semiconductor material having the second conductivity type, a channel portion of the body well region residing laterally between the source region and a first portion of the drift region, the first portion being adjacent to the channel portion; and
a gate structure overlying at least the channel portion of the body well region and the first portion of the drift region, wherein
a second portion of the gate structure overlying the channel portion proximate the source region has the second conductivity type,
a throttling portion of the gate structure overlies the first portion of the drift region and at least a portion of the channel portion,
a doping of the throttling portion is different from the second portion of the gate structure, and
a length of an area of the throttling portion that overlaps the channel portion varies along a width of the gate structure.
11. A semiconductor device structure comprising:
a plurality of body well regions of semiconductor material having a first conductivity type;
a plurality of drift regions of semiconductor material having a second conductivity type, at least a portion of each drift region being adjacent to a channel portion of at least one body well region of the plurality of body well regions;
a plurality of source regions of semiconductor material having the second conductivity type, a channel portion of the at least one body well region residing laterally between a respective source region and a respective drift region of the plurality of drift regions; and
a plurality of gate structures, each gate structure overlying at least the channel portion of a respective body well region of the plurality of body well regions, wherein:
the plurality of gate structures are electrically connected; and
a threshold voltage of at least one of the gate structures of the plurality of gate structures is different than the threshold voltage of one or more remaining gate structures of the plurality of gate structures.
12. The semiconductor device structure of claim 11 , wherein:
the plurality of drift regions are electrically connected; and
the plurality of source regions are electrically connected.
13. The semiconductor device structure of claim 11 , wherein:
each respective gate structure includes a layer of a conductive material; and
a respective threshold voltage of each respective gate structure corresponds to a respective area of the layer of the conductive material having the first conductivity type that overlies the channel portion of the respective body well region.
14. The semiconductor device structure of claim 11 , wherein a threshold voltage associated with a peripheral gate structure of the plurality of gate structures is less than a threshold voltage associated with an interior gate structure of the plurality of gate structures.
15. The semiconductor device structure of claim 11 , wherein a dopant concentration of the body well region is greater than 1×10 16 /cm 3 .
16. The semiconductor device structure of claim 11 , wherein threshold voltages are nonuniform across the plurality of gate structures.
17. The semiconductor device structure of claim 1 , wherein the throttling portion reduces an on-state current at the portion of the channel portion.
18. The semiconductor device structure of claim 1 , wherein a length of a portion of the throttling region that overlaps the portion of the channel portion influences a threshold voltage associated with the gate structure.
19. A semiconductor device structure comprising:
a body well region of semiconductor material having a first conductivity type;
a drift region of semiconductor material having a second conductivity type;
a source region of semiconductor material having the second conductivity type, a channel portion of the body well region residing laterally between the source region and a first portion of the drift region, the first portion being adjacent to the channel portion; and
a gate structure overlying at least the channel portion of the body well region and the first portion of the drift region, wherein
a second portion of the gate structure overlying the channel portion proximate the source region has the second conductivity type,
a throttling portion of the gate structure overlies the first portion of the drift region and at least a portion of the channel portion,
a doping of the throttling portion is different from the second portion of the gate structure, and
a threshold voltage associated with the gate structure is nonuniform with respect to a width of the gate structure and nonuniform with respect to a length of the gate structure.