Reducing MEMS stiction by increasing surface roughness
A mechanism for reducing stiction in a MEMS device by decreasing surface area between two surfaces, such as a travel stop and travel stop region, that can come into close contact is provided. Reduction in contact surface area is achieved by increasing surface roughness of the travel stop region. This is achieved by depositing a polysilicon layer over a dielectric layer using gaseous hydrochloric acid as one of the reactants. A subsequent etch back is performed to further increase the roughness. The deposition of polysilicon and subsequent etch back may be repeated one or more times in order to obtain the desired roughness. A final polysilicon layer may then be deposited to achieve a desired thickness. This final polysilicon layer is patterned to form the travel stop regions. The rougher surface decreases the surface area available for contact and, in turn, decreases the area through which stiction can be imparted.
1. A method for manufacturing a microelectromechanical systems (MEMS) device, the method comprising:
forming an insulating layer over a substrate;
depositing a first polysilicon layer on the insulating layer by reacting a silicon-containing gas, gaseous hydrochloric acid, and hydrogen for a first duration of time at a first temperature, wherein, during the deposition, the gaseous hydrochloric acid is at least 15% of a total flow of the gaseous hydrochloric acid and the silicon-containing gas;
etching the first polysilicon layer using gaseous hydrochloric acid and hydrogen for a second duration of time at a second temperature;
depositing a second polysilicon layer over the etched first polysilicon layer by reacting the silicon-containing gas and hydrogen for a third duration of time at a third temperature; and
patterning the second polysilicon layer and the first polysilicon layer to form a travel stop region of the MEMS device.
2. The method of claim 1 , further comprising:
forming a sacrificial layer over the travel stop region; and
forming a third polysilicon layer on the sacrificial layer.
3. The method of claim 2 , further comprising removing the sacrificial layer to separate the third polysilicon layer from the travel stop region.
4. The method of claim 1 , wherein after the etching the first polysilicon layer and prior to depositing the second polysilicon layer, the method further comprises:
depositing a third polysilicon layer on the etched first polysilicon layer by reacting the silicon-containing gas, gaseous hydrochloric acid, and hydrogen for a fourth duration of time at a fourth temperature, wherein, during the deposition of the third polysilicon layer, the gaseous hydrochloric acid is at least 15 % of a total flow of the gaseous hydrochloric acid and the silicon-containing gas; and
etching the third polysilicon layer using gaseous hydrochloric acid and hydrogen for a fifth duration of time at a fifth temperature, wherein the second polysilicon layer is deposited over the etched third polysilicon layer.
5. The method of claim 4 , wherein the first duration of time and fourth duration of time is each in a range of 5 to 15 minutes and wherein the first temperature and the fifth temperature is each at least 630 degrees Celsius.
6. The method of claim 4 , wherein the depositing the third polysilicon layer is performed by also reacting a dopant gas.
7. The method of claim 1 , wherein the first duration of time is in a range of 5 to 15 minutes and wherein the first temperature is at least 630 degrees Celsius.
8. The method of claim 7 , wherein the depositing the first polysilicon layer is performed by also reacting a dopant gas.
9. The method of claim 7 , wherein the second duration of time is in a range of 10 to 40 seconds and the second temperature is at least 950 degrees Celsius.
10. The method of claim 1 , wherein the deposited first polysilicon layer has a mean thickness of 40 nm with a tallest peak of at least 55nm and a lowest valley of at most 35 nm.
11. The method of claim 10 , wherein the travel stop region has a mean thickness of 350 nm with a tallest peak of at least 420 nm and a lowest valley of at most 300 nm.
12. A method for manufacturing a microelectromechanical systems (MEMS) device, the method comprising:
forming an insulating layer over a substrate;
depositing a first semiconductor layer on the insulating layer by reacting a semiconductor-containing gas, gaseous hydrochloric acid, and hydrogen for a first duration of time at a first temperature, wherein, during the deposition, the gaseous hydrochloric acid is at least 15% of a total flow of the gaseous hydrochloric acid and the semiconductor-containing gas;
etching the first semiconductor layer using gaseous hydrochloric acid and hydrogen for a second duration of time at a second temperature;
depositing a second semiconductor layer over the etched first polysilicon layer by reacting the semiconductor-containing gas and hydrogen for a third duration of time at a third temperature; and
patterning the second semiconductor layer and the first semiconductor layer to form a travel stop region of the MEMS device.
13. The method of claim 12 , wherein after the etching the first semiconductor layer and prior to depositing the second semiconductor layer, the method further comprises:
depositing a third semiconductor layer on the etched first semiconductor layer by reacting the semiconductor-containing gas, gaseous hydrochloric acid, and hydrogen for a fourth duration of time at a fourth temperature, wherein, during the deposition of the third polysilicon layer, the gaseous hydrochloric acid is at least 15% of a total flow of the gaseous hydrochloric acid and the semiconductor-containing gas; and
etching the third semiconductor layer using gaseous hydrochloric acid and hydrogen for a fifth duration of time at a fifth temperature, wherein the second semiconductor layer is deposited over the etched third semiconductor layer.
14. The method of claim 12 , wherein the depositing the third semiconductor layer is performed by also reacting a dopant gas.
15. The method of claim 12 , wherein the semiconductor-containing gas comprises one of silicon or germanium.
16. A method of manufacturing a microelectromechanical systems (MEMS) device comprising:
forming a fixed surface comprising
a first semiconductor layer over a substrate, wherein the first semiconductor layer has a mean thickness of 350 nm with a tallest peak of at least 420 nm and a lowest valley of at most 300 nm; and
a first insulating layer over at least a portion of the first semiconductor layer; and
forming a movable body comprising a second semiconductor layer providing a major surface facing the first semiconductor layer.
17. The method of claim 16 wherein forming the movable body comprises:
forming a pivoting proof mass of a teeter-totter accelerometer;
forming a travel stop feature, configured to contact the first semiconductor layer to prevent over rotation of the pivoting proof mass, and comprising a portion of the major surface facing the first semiconductor layer.
18. The method of claim 16 wherein the first semiconductor layer comprises one of silicon or germanium.
19. The method of claim 18 wherein the second semiconductor layer comprises one of silicon or germanium.
20. The method of claim 16 wherein the MEMS device comprises at least a portion of an accelerometer.