Altering capacitance of MIM capacitor having reactive layer therein
View Patent ↗Embodiments include a metal-insulator-metal (MIM) capacitor having: a first electrode; a second electrode disposed proximate the first electrode; an insulator layer between the first and second electrodes; and a reactive layer positioned proximate the insulator layer and configured to allow altering of the reactive layer to change a capacitive value of the MIM capacitor, the reactive layer including a reactive conductor.
1. A metal-insulator-metal (MIM) capacitor comprising:
a first electrode;
a second electrode disposed proximate the first electrode;
an insulator layer between the first and second electrodes; and
a reactive layer positioned proximate the insulator layer between the first and second electrodes and configured to allow altering of the reactive layer to change a capacitive value of the MIM capacitor, the reactive layer including a reactive conductor wherein the reactive layer includes silicon dioxide (SiO 2 ) in contact with the reactive conductor.
2. The MIM capacitor of claim 1 , wherein the reactive layer is positioned between the insulator layer and the first electrode.
3. The MIM capacitor of claim 1 , wherein the reactive layer is positioned between the insulator layer and the second electrode.
4. The MIM capacitor of claim 1 , wherein the reactive conductor is selected from the group comprising: aluminum (Al), titanium (Ti) and tantalum (Ta).
5. A metal-insulator-metal (MIM) capacitor comprising:
a first electrode;
a second electrode disposed proximate the first electrode;
an insulator layer between the first and second electrodes; and
a reactive layer positioned proximate the insulator layer between the first and second electrodes and configured to allow altering of the first reactive layer to change a capacitive value of the MIM capacitor, the reactive layer including a conductor material of one of: the first electrode and the second electrode wherein the reactive layer includes silicon dioxide (SiO 2 ) in contact with the reactive conductor.
6. The MIM capacitor of claim 5 , wherein the reactive layer includes a portion of the first electrode that is contact with the insulator layer.
7. The MIM capacitor of claim 5 , wherein the reactive layer includes a portion of the second electrode that is contact with the insulator layer.
8. The MIM capacitor of claim 5 , wherein the reactive layer is selected from the group comprising: aluminum (Al), silicon (Si), titanium (Ti) and tantalum (Ta).