Bipolar junction transistors with a buried dielectric region in the active device region
View Patent ↗Device structure and fabrication methods for a bipolar junction transistor. A trench isolation region is formed that bounds an active device region along a sidewall. A dielectric region is formed that extends laterally from the sidewall of the active device region into the active device region. The dielectric region is located beneath a top surface of the active device region such that a section of the active device region is located between the top surface and the dielectric region.
1. A method of fabricating a device structure, the method comprising:
forming a trench isolation region that has a sidewall coextensive with a sidewall of an active device region comprised of a semiconductor material; and
forming a dielectric region extending laterally from the sidewall of the active device region into the active device region,
wherein the active device region comprises a collector, and the dielectric region is located beneath a top surface of the active device region such that a section of the active device region is located between the top surface and the dielectric region, and
wherein forming the dielectric region extending laterally from the sidewall of the active device region into the active device region comprises:
forming a trench extending partially through the trench isolation region that is coextensive with a portion of the sidewall of the active device region; and
forming a damaged region in the semiconductor material beneath the portion of the sidewall of the active device region.
2. The method of claim 1 wherein forming the dielectric region extending laterally from the sidewall of the active device region into the active device region further comprises:
removing the damaged region with a selective etching process that removes the damaged region at a greater etch rate than surrounding semiconductor material,
wherein the dielectric region comprises an air gap.
3. The method of claim 2 further comprising:
after the damaged region is removed, filling the trench with a dielectric material using a directional deposition process that preserves and closes the air gap.
4. The method of claim 1 wherein forming the dielectric region extending laterally from the sidewall of the active device region into the active device region further comprises:
converting the damaged region of the active device region into a first dielectric material with an oxidation process.
5. The method of claim 4 further comprising:
after the damaged region is converted into the first dielectric material, filling the trench with a second dielectric material.
6. The method of claim 1 wherein forming the damaged region in the semiconductor material beneath the portion of the sidewall of the active device region comprises:
implanting the semiconductor material beneath the portion of the sidewall of the active device region with ions having ion trajectories directed into the trench.
7. The method of claim 6 wherein the ion trajectories are angled relative to the top surface of the device region and to the sidewall of the active device region.
8. The method of claim 1 wherein forming the trench extending partially through the trench isolation region that is coextensive with a portion of the sidewall of the active device region comprises:
etching the trench to a first depth into the trench isolation region;
applying spacers to the sidewall of the active device region over the first depth; and
after the spacers are applied, etching the trench to a second depth into the trench isolation region that is greater than the first depth to expose the portion of the sidewall of the active device region between the first depth and the second depth.
9. The method of claim 8 wherein forming the damaged region in the semiconductor material beneath the portion of the sidewall of the active device region comprises:
implanting the semiconductor material beneath the portion of the sidewall of the active device region with ions having ion trajectories directed into the trench.
10. The method of claim 9 wherein the ion trajectories are angled relative to the top surface of the device region and to the sidewall of the active device region.
11. A method of fabricating a device structure, the method comprising:
forming a trench isolation region that has a sidewall coextensive with a sidewall of an active device region comprised of a semiconductor material having a first conductivity type;
forming a dielectric region extending laterally from the sidewall of the active device region into the active device region; and
introducing a dopant into a section of the active device region located between the top surface and the dielectric region,
wherein the active device region comprises a collector, and the dielectric region is located beneath a top surface of the active device region such that the section of the active device region is located between the top surface and the dielectric region, and
wherein introducing the dopant into the section of the active device region located between the top surface and the dielectric region comprises:
implanting the section of the active device region with ions of a second conductivity type different from the first conductivity type.
12. The method of claim 1 comprising
after the dielectric region is formed, forming a base layer on the active device region.
13. The method of claim 12 comprising:
introducing a dopant into a section of the base layer overlying the section of the active device region to define an extrinsic base.
14. A device structure for a heterojunction bipolar transistor, the device structure fabricated using a semiconductor substrate, the device structure comprising:
a trench isolation region in the semiconductor substrate, the trench isolation region having a sidewall;
an active device region having a top surface and a sidewall coextensive with the sidewall of the trench isolation region, the active device region comprised of a portion of the semiconductor substrate, and the active device region comprising a collector; and
a dielectric region extending laterally from the sidewall of the active device region into the active device region, the dielectric region located beneath a top surface of the active device region such that a section of the active device region is located between the top surface and the dielectric region,
wherein the active device region is comprised of a semiconductor material having a first conductivity type, the active device region includes a doped section located between the top surface and the dielectric region, and the doped section of the active device region is comprised of the semiconductor material with a second conductivity type different from the first conductivity type.
15. The device structure of claim 14 wherein the active device region is comprised of a semiconductor material, the trench isolation region includes a trench that is coextensive with a portion of the sidewall, and the trench is filled with a dielectric material.
16. The device structure of claim 14 wherein the dielectric region comprises an air gap.
17. The device structure of claim 14 wherein the dielectric region is comprised of a solid dielectric material.
18. The method of claim 11 wherein the dielectric region comprises an air gap.
19. The method of claim 11 wherein the dielectric region is comprised of a solid dielectric material.
20. The method of claim 1 wherein the semiconductor material of the active device region has a first conductivity type, and comprising:
implanting the section of the active device region with ions of a second conductivity type different from the first conductivity type.