Switchable filters and design structures
Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a fixed electrode with a plurality of fingers on the piezoelectric substrate. The method further includes forming a moveable electrode with a plurality of fingers over the piezoelectric substrate. The method further includes forming actuators aligned with one or more of the plurality of fingers of the moveable electrode.
1. A filter comprising at least one filter comprising a plurality of electrodes formed on a piezoelectric substrate, wherein the plurality of electrodes include a moveable electrode and a fixed electrode both with a plurality of fingers that are positioned to be interleaved with one another in an on state.
2. The filter of claim 1 , wherein the moveable electrode is a ground electrode and the fixed electrode is a signal electrode.
3. The filter of claim 1 , wherein the moveable electrode is a signal electrode and the fixed electrode is a ground electrode.
4. The filter of claim 1 , further comprising a plurality of actuators positioned above and below the moveable electrode.
5. The filter of claim 1 , further comprising a plurality of actuators aligned with one or more of the plurality of fingers of the moveable electrode.
6. The filter of claim 5 , wherein the actuators are metal or metal alloy in trenches in the piezoelectric substrate.
7. A filter comprising at least one filter comprising a plurality of electrodes formed on a piezoelectric substrate, wherein the plurality of electrodes include a moveable electrode and a fixed electrode both with a plurality of fingers that are positioned to be interleaved with one another in an on state, wherein the moveable electrode is a ground electrode, which, upon actuation, the plurality of fingers of the moveable electrode become interleaved with the plurality of fingers of the fixed electrode.
8. A filter comprising at least one filter comprising a plurality of electrodes formed on a piezoelectric substrate, wherein the plurality of electrodes include a moveable electrode and a fixed electrode both with a plurality of fingers that are positioned to be interleaved with one another in an on state, wherein the moveable electrode is a Vin or Vout electrode, which, upon actuation, the plurality of fingers of the Vin or Vout electrode become interleaved with the plurality of fingers of the ground electrode.
9. The filter of claim 1 , further comprising actuators which are less than a number of the plurality of fingers of the moveable electrode.
10. The filter of claim 1 , wherein the at least one filter is a surface acoustic wave (SAW) filter.
11. The filter of claim 10 , wherein the SAW filter comprises:
a Vin interdigital transducer (IDT) comprising interleaved signal and ground electrodes; and
a Vout IDT comprising interleaved signal and ground electrodes.
12. The filter of claim 11 , wherein, wherein the moveable electrode comprises positioning the moveable electrode above the signal electrode of the Vin IDT or the Vout IDT.