IP Library › Granted Patent US 10,903,097
Granted Patent Utility
US 10,903,097 · Confirmation No. 1896

IN-SITU WAFER TEMPERATURE MEASUREMENT AND CONTROL

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2023-07-07 MF.AD.PAIR Maintenance Fee Address Change for PAIR 1 View
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2020-01-30 CTNF Non-Final Rejection 12 View
2020-01-30 892 List of references cited by examiner 1 View
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2020-01-30 1449 List of References cited by applicant and considered by examiner 4 View
2019-10-03 NTC.PUB Notice of Publication 1 View
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2019-03-28 SPEC Specification 28 View
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Quick Facts
Patent No.
US 10,903,097
App. No.
16/367,948
Filed
2019-03-28
Granted
2021-01-26
Pub. No.
US20190304820A1
Art Unit
2881
PTA
0 days