Bonded assembly containing low dielectric constant bonding dielectric material
A first metal layer can be deposited over first dielectric material layers of a first substrate, and can be patterned into first bonding pads. A first low-k material layer can be formed over the first bonding pads. The first low-k material layer includes a low-k dielectric material such as a MOF dielectric material or organosilicate glass. A second semiconductor die including second bonding pads can be provided. The first bonding pads are bonded to the second bonding pads to form a bonded assembly.
1. A bonded assembly, comprising:
a first semiconductor die comprising a first substrate, first semiconductor devices, and first bonding pads that are electrically connected to a respective node of the first semiconductor devices and laterally surrounded by a first pad-level dielectric layer, wherein the first pad-level dielectric layer comprises a first low-k dielectric layer comprising a dielectric material having a dielectric constant of 2.6 or less; and
a second semiconductor die comprising a second substrate, second semiconductor devices, and second bonding pads that are electrically connected to a respective node of the second semiconductor devices and laterally surrounded by a second pad-level dielectric layer, wherein each of the second bonding pads is bonded to a respective one of the first bonding pads;
wherein the first pad-level dielectric layer further comprises a first dielectric liner comprising vertically-extending portions that laterally surround, and contact, a respective one of the first bonding pads and a horizontally-extending portion adjoined to proximal ends of the vertically-extending portions;
wherein a vertical distance between the horizontally-extending portion of the first dielectric liner and the first substrate is less than or is equal to a vertical distance between each of the first bonding pads and the first substrate; and
wherein each of the vertically-extending portions of the first dielectric liner comprises a straight outer sidewall segment that vertically extends parallel to a sidewall of a respective one of the first bonding pads and a convex outer sidewall segment that is adjoined to a distal end of the straight outer sidewall segment and contacts a concave surface segment of the first low-k dielectric layer.
2. The bonded assembly of claim 1 , wherein the first low-k dielectric layer comprises a first metal-organic framework (MOF) dielectric material.
3. The bonded assembly of claim 1 , wherein the first low-k dielectric layer comprises a non-porous organosilicate glass material or a porous organosilicate glass material.
4. The bonded assembly of claim 1 , wherein:
each of the first bonding pads comprises a first metallic plate and a first metallic capping liner contacting a distal planar surface and sidewall surfaces of the first metallic plate, the distal planar surface being more distal from the first substrate than the sidewall surfaces of the first metallic plate are from the first substrate; and
each of the first metallic capping liners comprises a horizontal surface that directly contacts and provides metal-to-metal bonding with a horizontal surface of a respective one of the second bonding pads.
5. The bonded assembly of claim 4 , wherein each of the first metallic capping liners further comprises a horizontally-extending portion contacting the distal planar surface of a respective one of the first metallic plates and a tubular portion contacting the sidewalls of the respective one of the first metallic plates and having a same thickness as the horizontally-extending portion.
6. The bonded assembly of claim 1 , wherein the first semiconductor die comprises a first dielectric capping layer contacting a distal horizontal surface of the first low-k dielectric layer, and wherein the first bonding pads vertically extend through openings in the first dielectric capping layer and contact sidewalls of the openings in the first dielectric capping layer.
7. The bonded assembly of claim 6 , wherein the second semiconductor die further comprises:
a second low-k dielectric layer laterally surrounding the second bonding pads and comprising a dielectric material having a dielectric constant of 2.6 or less and selected from a metal-organic framework (MOF) material, a nonporous organosilicate glass material, or a porous organosilicate glass material; and
a second dielectric capping layer located on the second low-k dielectric layer and contacting the first dielectric capping layer, wherein the second bonding pads vertically extend through openings in the second dielectric capping layer and contact sidewalls of the openings in the second dielectric capping layer.
8. The bonded assembly of claim 7 , wherein the second dielectric capping layer is bonded to the first dielectric capping layer by dielectric-to-dielectric bonding.
9. The bonded assembly of claim 7 , wherein the first low-k dielectric layer and the second low-k dielectric layer have a dielectric constant of 1.7 to 2.6.
10. The bonded assembly of claim 1 , wherein the first semiconductor devices comprise a three-dimensional memory device and the second semiconductor devices comprise a peripheral circuit for the three-dimensional memory device.