Patent Application
Provisional
App. No. 62/670,307
· Confirmation No. 8167
HYDROGEN BLEED GAS FOR AN ION SOURCE HOUSING
Applicant:
Axcelis Technologies, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2018-05-24 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-05-11 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2018-05-11 | ADS |
Application Data Sheet | 8 | View | |
| 2018-05-11 | SPEC |
Specification | 13 | View | |
| 2018-05-11 | CLM |
Claims | 5 | View | |
| 2018-05-11 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2018-05-11 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-05-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Neil K. Colvin
Merrimac, NH
Tseh-Jen Hsieh
Rowley, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- EATNP373P
- Confirmation No.
- 8167
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
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Quick Facts
- App. No.
- 62/670,307
- Filed
- 2018-05-11
External Links