Patent Application
Provisional
App. No. 63/040,724
· Confirmation No. 3524
STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING
Applicant:
Axcelis Technologies, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2020-06-24 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2020-06-18 | ADS |
Application Data Sheet | 9 | View | |
| 2020-06-18 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2020-06-18 | CLM |
Claims | 2 | View | |
| 2020-06-18 | SPEC |
Specification | 9 | View | |
| 2020-06-18 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2020-06-18 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2020-06-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Wilhelm Platow
Newburyport, MA
Neil Bassom
Hamilton, MA
Shu Satoh
Byfield, MA
Paul Silverstein
Arlington, MA
Marvin Farley
Ipswich, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- EATNP398P
- Confirmation No.
- 3524
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
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Quick Facts
- App. No.
- 63/040,724
- Filed
- 2020-06-18
External Links