Patent Assignment
Reel/Frame 004905/0388
Assignment of Assignors Interest.
Recorded: 1988-06-20
Pages: 2
Assignor
DRAGE, DAVID J.
Executed: 1988-06-13
Assignee
TEGAL CORPORATION
A CORP. OF DE, SCHAUMBURG, ILLINOIS
Covered Property
(1)
Non-Uniform Gas Inlet for Dry Etching Apparatus
Patent:
4,780,169 →
Application:
07/048,344 →
Related Assignments
(5)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignors Interest.
Aug 9, 1990
From: TEGAL CORPORATION, A CORP. OF DE
To: MOTOROLA, INC., A DE CORP.
Reel/Frame 005439/0781 →
Security Agreement
Jun 14, 1999
From: TEGAL CORPORATION
To: IMPERIAL BANK
Reel/Frame 010018/0169 →
Security Agreement
May 10, 2000
From: TEGAL CORPORATION; TEGAL JAPAN, INC.
To: COAST BUSINESS CREDIT, A DIVISION OF SOUTHERN PACIFIC BANK
Reel/Frame 010785/0795 →
Security Agreement
Nov 26, 2002
From: TEGAL CORPORATION
To: SILICON VALLEY BANK
Reel/Frame 013506/0749 →
Security Interest
Jul 21, 2003
From: TEGAL CORPORATION
To: HIRSCHMAN, ORIN
Reel/Frame 014242/0813 →