Patent Assignment
Reel/Frame 005268/0733
Assignment of Assignors Interest.
Recorded: 1990-03-23
Pages: 3
Assignee
TEGAL CORPORATION, A CORP. OF CA
NOVATO,, CALIFORNIA
Covered Property
(1)
Xenon Enhanced Plasma Etch
Patent:
4,786,359 →
Application:
07/065,746 →
Related Assignments
(5)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignors Interest.
Aug 9, 1990
From: TEGAL CORPORATION, A CORP. OF DE
To: MOTOROLA, INC., A DE CORP.
Reel/Frame 005439/0781 →
Security Agreement
Jun 14, 1999
From: TEGAL CORPORATION
To: IMPERIAL BANK
Reel/Frame 010018/0169 →
Security Agreement
May 10, 2000
From: TEGAL CORPORATION; TEGAL JAPAN, INC.
To: COAST BUSINESS CREDIT, A DIVISION OF SOUTHERN PACIFIC BANK
Reel/Frame 010785/0795 →
Security Agreement
Nov 26, 2002
From: TEGAL CORPORATION
To: SILICON VALLEY BANK
Reel/Frame 013506/0749 →
Security Interest
Jul 21, 2003
From: TEGAL CORPORATION
To: HIRSCHMAN, ORIN
Reel/Frame 014242/0813 →