Patent Assignment
Reel/Frame 008425/0632
Assignment of Assignor's Interest
Recorded: 1997-02-28
Pages: 3
Assignors
CHEN, JANG FUNG
Executed: 1997-02-27
WAMPLER, KURT E.
Executed: 1997-02-27
LAIDIG, THOMAS L.
Executed: 1997-02-27
Assignee
MICROUNITY SYSTEMS ENGINEERING, INC.
255 CASPIAN DRIVE, SUNNYVALE, CALIFORNIA, 94089
Covered Property
(1)
Optical Proximity Correction Method for Intermediate-Pitch Features Using Sub-Resolution Scattering Bars on a Mask
Patent:
5,821,014 →
Application:
08/808,587 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 20, 1999
From: MICROUNITY SYSTEMS ENGINEERING, INC.
To: ASM LITHOGRAPHY HOLDING, N.V.
Reel/Frame 010180/0179 →
Assignment of Assignor's Interest
Oct 4, 2006
From: ASM LITHOGRAPHY HOLDING, N.V.
To: ASML MASKTOOLS NETHERLANDS B.V.
Reel/Frame 018345/0764 →
Assignment of Assignor's Interest
Feb 7, 2014
From: ASML MASKTOOLS B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 032170/0425 →