Patent Assignment
Reel/Frame 010180/0179
Assignment of Assignor's Interest
Recorded: 1999-08-20
Pages: 7
Assignor
MICROUNITY SYSTEMS ENGINEERING, INC.
Executed: 1999-07-02
Assignee
ASM LITHOGRAPHY HOLDING, N.V.
DE RUN 1110, 5503 LA VELDHOVEN, NETHERLANDS
Covered Property
(1)
Optical Proximity Correction Method for Intermediate-Pitch Features Using Sub-Resolution Scattering Bars on a Mask
Patent:
5,821,014 →
Application:
08/808,587 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 28, 1997
From: CHEN, JANG FUNG; WAMPLER, KURT E.; LAIDIG, THOMAS L.
To: MICROUNITY SYSTEMS ENGINEERING, INC.
Reel/Frame 008425/0632 →
Assignment of Assignor's Interest
Oct 4, 2006
From: ASM LITHOGRAPHY HOLDING, N.V.
To: ASML MASKTOOLS NETHERLANDS B.V.
Reel/Frame 018345/0764 →
Assignment of Assignor's Interest
Feb 7, 2014
From: ASML MASKTOOLS B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 032170/0425 →