Patent Assignment
Reel/Frame 009172/0764
Assignment of Assignor's Interest
Recorded: 1998-05-12
Pages: 3
Assignors
CHEN, J. FUNG
Executed: 1998-05-06
WAMPLER, KURT E.
Executed: 1998-05-06
LAIDIG, TOM
Executed: 1998-05-06
Assignee
MICROUNITY SYSTEMS ENGINEERING, INC.
475 POTRERO AVENUE, SUNNYVALE, CALIFORNIA, 94086
Covered Property
(1)
Method of Fine Feature Edge Tuning with Optically-Halftoned Mask
Patent:
6,114,071 →
Application:
09/055,355 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 28, 2000
From: ASM LITHOGRAPHY HOLDING, N.V.
To: ASML MASKTOOLS NETHERLANDS B.V.
Reel/Frame 010936/0440 →
Assignment of Assignor's Interest
Jun 28, 2000
From: MICROUNITY SYSTEMS ENGINEERING, INC.
To: ASM LITHOGRAPHY HOLDING, N.V.
Reel/Frame 010945/0426 →
Assignment of Assignor's Interest
Feb 7, 2014
From: ASML MASKTOOLS B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 032170/0425 →