Patent Assignment
Reel/Frame 010945/0426
Assignment of Assignor's Interest
Recorded: 2000-06-28
Pages: 7
Assignor
MICROUNITY SYSTEMS ENGINEERING, INC.
Executed: 1999-07-02
Assignee
ASM LITHOGRAPHY HOLDING, N.V.
P.O. BOX 324, VELDHOVEN, 5500, NETHERLANDS
Covered Property
(1)
Method of Fine Feature Edge Tuning with Optically-Halftoned Mask
Patent:
6,114,071 →
Application:
09/055,355 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
May 12, 1998
From: CHEN, J. FUNG; WAMPLER, KURT E.; LAIDIG, TOM
To: MICROUNITY SYSTEMS ENGINEERING, INC.
Reel/Frame 009172/0764 →
Assignment of Assignor's Interest
Jun 28, 2000
From: ASM LITHOGRAPHY HOLDING, N.V.
To: ASML MASKTOOLS NETHERLANDS B.V.
Reel/Frame 010936/0440 →
Assignment of Assignor's Interest
Feb 7, 2014
From: ASML MASKTOOLS B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 032170/0425 →