Patent Assignment
Reel/Frame 010003/0874
Assignment of Assignor's Interest
Recorded: 1999-06-02
Pages: 3
Assignors
CHEN, J. FUNG
Executed: 1999-05-04
CALDWELL, ROGER
Executed: 1999-05-06
LAIDIG, TOM
Executed: 1999-05-07
WAMPLER, KURT E.
Executed: 1999-05-07
Assignee
MICROUNITY SYSTEMS ENGINEERING, INC.
475 POTRERO AVENUE, SUNNYVALE, CALIFORNIA, 94086
Covered Property
(1)
Method of Patterning Sub-0.25 Lambda Line Features with High Transmission, "Attenuated" Phase Shift Masks
Patent:
6,312,854 →
Application:
09/270,052 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 11, 2000
From: MICROUNITY SYSTEMS ENGINEERING, INC.
To: ASM LITHOGRAPHY HOLDING, N.V.
Reel/Frame 011120/0593 →
Assignment of Assignor's Interest
Aug 14, 2000
From: ASM LITHOGRAPHY HOLDING, N.V.
To: ASML MASKTOOLS NETHERLANDS B.V.
Reel/Frame 011128/0170 →
Assignment of Assignor's Interest
Feb 7, 2014
From: ASML MASKTOOLS B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 032170/0425 →