Patent Assignment
Reel/Frame 011120/0593
Assignment of Assignor's Interest
Recorded: 2000-08-11
Pages: 7
Assignor
MICROUNITY SYSTEMS ENGINEERING, INC.
Executed: 1999-07-02
Assignee
ASM LITHOGRAPHY HOLDING, N.V.
P.O. BOX 324, VELDHOVEN, 5500, NETHERLANDS
Covered Property
(1)
Method of Patterning Sub-0.25 Lambda Line Features with High Transmission, "Attenuated" Phase Shift Masks
Patent:
6,312,854 →
Application:
09/270,052 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 2, 1999
From: CHEN, J. FUNG; CALDWELL, ROGER; LAIDIG, TOM; WAMPLER, KURT E.
To: MICROUNITY SYSTEMS ENGINEERING, INC.
Reel/Frame 010003/0874 →
Assignment of Assignor's Interest
Aug 14, 2000
From: ASM LITHOGRAPHY HOLDING, N.V.
To: ASML MASKTOOLS NETHERLANDS B.V.
Reel/Frame 011128/0170 →
Assignment of Assignor's Interest
Feb 7, 2014
From: ASML MASKTOOLS B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 032170/0425 →