Patent Assignment
Reel/Frame 011849/0176
Assignment of Assignor's Interest
Recorded: 2001-05-23
Pages: 4
Assignors
HAN, QINGYUAN
Executed: 2001-05-17
BERRY, IVAN
Executed: 2001-05-17
DAHROOGE, GARY
Executed: 2001-05-17
WALDFRIED, CALO
Executed: 2001-05-17
ESCORIA, ORLANDO
Executed: 2001-05-17
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Plasma Process for Removing Polymer and Residues from Substrates
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Corrected Recordation Form Cover Sheet
Jan 8, 2002
From: HAN, QINGYUAN; BERRY, IVAN; DAHROOGE, GARY; WALDFRIED, CARLO
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 012445/0647 →
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →