IP Library › Assignment 012445/0647
Patent Assignment
Reel/Frame 012445/0647

Corrected Recordation Form Cover Sheet

Recorded: 2002-01-08 Pages: 4
Assignors
HAN, QINGYUAN
Executed: 2001-05-17
BERRY, IVAN
Executed: 2001-05-17
DAHROOGE, GARY
Executed: 2001-05-17
WALDFRIED, CARLO
Executed: 2001-05-17
ESCORCIA, ORLANDO
Executed: 2001-05-17
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property (1)
Plasma Process for Removing Polymer and Residues from Substrates
Patent: 6,834,656 →
Application: 09/864,003 →
Publication: US 2002/0185151
Related Assignments (4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest May 23, 2001
From: HAN, QINGYUAN; BERRY, IVAN; DAHROOGE, GARY; WALDFRIED, CALO
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 011849/0176 →
Security Agreement May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Assignment of Assignor's Interest Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →