Patent Assignment
Reel/Frame 012421/0271
Assignment of Assignor's Interest
Recorded: 2001-10-19
Pages: 5
Assignor
BERRIAN, DONALD W.
Executed: 2001-10-19
Assignee
PROTEROS, LLC
42B CHERRY HILL DRIVE, DANVERS, MASSACHUSETTS, 01923
Covered Property
(1)
System and Method for Rapidly Controlling the Output of an Ion Source for Ion Implantation
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 8, 2004
From: PROTEROS, LLC
To: AXCELIS TECHNOLOGIES, INC
Reel/Frame 015074/0752 →
Security Agreement
Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →