IP Library › Assignment 015074/0752
Patent Assignment
Reel/Frame 015074/0752

Assignment of Assignor's Interest

Recorded: 2004-03-08 Pages: 5
Assignor
PROTEROS, LLC
Executed: 2004-03-08
Assignee
AXCELIS TECHNOLOGIES, INC
108 CHERRY HILL DRIVE, ATTN: PATENT LAW DEPARTMENT, BEVERLY, MASSACHUSETTS, 01915
Covered Properties (4)
Compact Load Lock System for Ion Beam Processing of Foups
Patent: 6,428,262 →
Application: 09/637,096 →
Ion Implantation Uniformity Correction Using Beam Current Control
Patent: 6,661,016 →
Application: 09/887,808 →
Publication: US 2001/0054698
System and Method for Rapidly Controlling the Output of an Ion Source for Ion Implantation
Patent: 7,247,863 →
Application: 10/032,664 →
Publication: US 2002/0053642
Substrate Positioning System
Patent: 6,777,687 →
Application: 10/153,114 →
Publication: US 2002/0134950
Related Assignments (6)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest Sep 28, 2001
From: BERRIAN, DONALD W.
To: PROTEROS, LLC
Reel/Frame 012209/0092 →
Assignment of Assignor's Interest Oct 19, 2001
From: BERRIAN, DONALD W.
To: PROTEROS, LLC
Reel/Frame 012421/0271 →
Security Agreement May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Security Agreement Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
Security Interest Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →