Granted Patent
Utility
US 6,661,016
· Confirmation No. 7625
ION IMPLANTATION UNIFORMITY CORRECTION USING BEAM CURRENT CONTROL
Inventor:
Donald W. Berrian
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-30 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-09-30 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2001-06-22 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-06-22 | SPEC |
Specification | 8 | View | |
| 2001-06-22 | CLM |
Claims | 3 | View | |
| 2001-06-22 | ABST |
Abstract | 1 | View | |
| 2001-06-22 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-06-22 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Donald W. Berrian
Topsfield, MA
Attorneys & Agents of Record
Classification
USPC
250/492.21
Prosecution
- Examiner
- NGUYEN, JUDY
- Art Unit
- 2861
- Customer No.
- 30955
- Docket No.
- 390482
- Confirmation No.
- 7625
Publication
- Pub. No.
- US20010054698A1
- Pub. Date
- 2001-12-27
Patent Term Adjustment
-71days
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
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Quick Facts
- Patent No.
- US 6,661,016
- App. No.
- 09/887,808
- Filed
- 2001-06-22
- Granted
- 2003-12-09
- Pub. No.
- US20010054698A1
- Examiner
- NGUYEN, JUDY
- Art Unit
- 2861
- PTA
- -71 days
External Links