Assignment of Assignor's Interest

Recorded: 2002-03-26 Pages: 3

Assignor

CHEN, J. FUNG

Executed: 2002-03-22

Assignee

ASML MASKTOOLS NETHERLANDS B.V.

P.O. BOX 324, VELDHOVEN, 5500,, NETHERLANDS

Covered Property (1)

Method and Apparatus for Detecting Aberrations in an Optical System

Patent: 6,788,400 →

Application: 10/001,196 →

Publication: US 2002/0088951

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.