Patent Assignment
Reel/Frame 014346/0727
Assignment of Assignor's Interest
Recorded: 2004-02-19
Pages: 4
Assignors
PINGREE, JR., RICHARD E.
Executed: 2004-02-17
SAKTHIVEL, PALANIKUMARA
Executed: 2004-02-17
VANODIA, MUHESH
Executed: 2004-02-18
COLSON, MICHAEL B.
Executed: 2004-02-17
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Method and System for Detection of Solid Materials in a Plasma Using an Electromagnetic Circuit
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
First Amendment to Security Agreement
May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →