Patent Assignment
Reel/Frame 014587/0094
Assignment of Assignor's Interest
Recorded: 2004-05-10
Pages: 2
Assignees
SVG LITHOGRAPHY SYSTEMS, INC.
77 DANBURY ROAD, WILTON, CONNECTICUT, 06897
SVG LITHOGRAPHY SYSTEMS, INC.
77 DANBURY ROAD, WILTON, CONNECTICUT, 06897
Covered Property
(1)
Duv Scanner Linewidth Control by Mask Error Factor Compensation
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Certificate of Ownership
May 10, 2004
From: SVG LITHOGRAPHY SYSTEMS, INC.
To: ASML US, INC.
Reel/Frame 014587/0142 →
Conversion
May 10, 2004
From: ASML US, INC.
To: ASML US, LLC
Reel/Frame 014587/0153 →
Merger
May 10, 2004
From: ASM LITHOGRAPHY, INC. AND ASML US, LLC
To: ASML US, INC.
Reel/Frame 014587/0181 →
Confirmatory Assignment
May 10, 2004
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 014587/0185 →