Patent Assignment
Reel/Frame 014587/0185
Confirmatory Assignment
Recorded: 2004-05-10
Pages: 17
Assignor
ASML US, INC.
Executed: 2003-10-09
Assignee
ASML HOLDING N.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Duv Scanner Linewidth Control by Mask Error Factor Compensation
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
May 10, 2004
From: GOVIL, PRADEEP K.; TSACOYEANES, JAMES
To: SVG LITHOGRAPHY SYSTEMS, INC.; SVG LITHOGRAPHY SYSTEMS, INC.
Reel/Frame 014587/0094 →
Certificate of Ownership
May 10, 2004
From: SVG LITHOGRAPHY SYSTEMS, INC.
To: ASML US, INC.
Reel/Frame 014587/0142 →
Conversion
May 10, 2004
From: ASML US, INC.
To: ASML US, LLC
Reel/Frame 014587/0153 →
Merger
May 10, 2004
From: ASM LITHOGRAPHY, INC. AND ASML US, LLC
To: ASML US, INC.
Reel/Frame 014587/0181 →