Patent Assignment
Reel/Frame 014587/0153
Conversion
Recorded: 2004-05-10
Pages: 3
Assignor
ASML US, INC.
Executed: 2002-10-04
Assignee
ASML US, LLC
1209 ORANGE STREET, WILMINGTON, DELAWARE, 19801
Covered Property
(1)
Duv Scanner Linewidth Control by Mask Error Factor Compensation
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
May 10, 2004
From: GOVIL, PRADEEP K.; TSACOYEANES, JAMES
To: SVG LITHOGRAPHY SYSTEMS, INC.; SVG LITHOGRAPHY SYSTEMS, INC.
Reel/Frame 014587/0094 →
Certificate of Ownership
May 10, 2004
From: SVG LITHOGRAPHY SYSTEMS, INC.
To: ASML US, INC.
Reel/Frame 014587/0142 →
Merger
May 10, 2004
From: ASM LITHOGRAPHY, INC. AND ASML US, LLC
To: ASML US, INC.
Reel/Frame 014587/0181 →
Confirmatory Assignment
May 10, 2004
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 014587/0185 →