Patent Assignment
Reel/Frame 014587/0142
Certificate of Ownership
Recorded: 2004-05-10
Pages: 5
Assignor
SVG LITHOGRAPHY SYSTEMS, INC.
Executed: 2001-12-21
Assignee
ASML US, INC.
8555 SOUTH RIVER PARKWAY, TEMPE, ARIZONA, 85284
Covered Property
(1)
Duv Scanner Linewidth Control by Mask Error Factor Compensation
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
May 10, 2004
From: GOVIL, PRADEEP K.; TSACOYEANES, JAMES
To: SVG LITHOGRAPHY SYSTEMS, INC.; SVG LITHOGRAPHY SYSTEMS, INC.
Reel/Frame 014587/0094 →
Conversion
May 10, 2004
From: ASML US, INC.
To: ASML US, LLC
Reel/Frame 014587/0153 →
Merger
May 10, 2004
From: ASM LITHOGRAPHY, INC. AND ASML US, LLC
To: ASML US, INC.
Reel/Frame 014587/0181 →
Confirmatory Assignment
May 10, 2004
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 014587/0185 →