IP Library › Assignment 015702/0012
Patent Assignment
Reel/Frame 015702/0012

Assignment of Assignor's Interest

Recorded: 2004-08-13 Pages: 3
Assignors
PETRY, KLAUS
Executed: 2004-08-11
FERRARA, JOSEPH
Executed: 2004-07-30
BECKER, KLAUS
Executed: 2004-08-10
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property (1)
Ion Beam Measurement Systems and Methods for Ion Implant Dose and Uniformity Control
Patent: 6,992,309 →
Application: 10/917,597 →
Publication: US 2006/0033045
Related Assignments (4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Consent and License Agreement Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
Security Interest Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →