Patent Assignment
Reel/Frame 016186/0121
Assignment of Assignor's Interest
Recorded: 2005-05-02
Pages: 3
Assignor
AERONEX, INC.
Executed: 2005-04-01
Assignee
MYKROLIS CORPORATION
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Lithographic Projection Apparatus, Gas Purging Method and Device Manufacturing Method and Purge Gas Supply System
Related Assignments
(9)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 25, 2004
From: VAN DER NET, ANTONIUS JOHANNNES; VAN BRAGT, JOHANNUS JOSEPHUS; SPIEGELMAN, JEFFREY J.
To: AERONEX, INC.; ASML NETHERLANDS B.V.
Reel/Frame 015016/0285 →
Merger
Jul 28, 2006
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 018026/0873 →
Security Interest
May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
Security Interest
May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
Release of Security Interest
Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.
Reel/Frame 047477/0032 →
Release of Security Interest
Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.
Reel/Frame 047477/0151 →
Security Interest
Nov 13, 2018
From: ENTEGRIS, INC.; SAES PURE GAS, INC.
To: GOLDMAN SACHS BANK USA
Reel/Frame 048811/0679 →
Assignment of Patent Security Interest Recorded at Reel/Frame 048811/0679
Nov 5, 2019
From: GOLDMAN SACHS BANK USA
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 050965/0035 →
Security Interest
Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →