Patent Assignment
Reel/Frame 016647/0193
Correction to Our Error
Recorded: 2005-08-18
Pages: 8
Assignors
HILLMANN, FRANK
Executed: 2004-12-01
VOLLRATH, WOLFGANG
Executed: 2004-12-20
SCHEURING, GERD
Executed: 2004-11-29
BRUECK, HANS-JUERGEN
Executed: 2004-12-07
Assignees
LEICA MICROSYSTEMS SEMICONDUCTOR GMBH
ERNST-LEITZ-STRASSE 17-37, WETZLAR, D-35578, GERMANY
MUETEC AUTOMATISIERTE MIKROSKOPIE UND MESSTECHNIK GMBH
WILDERMUTHSTRASSE 88, MUENCHEN, D-80993, GERMANY
Covered Property
(1)
Apparatus for Measuring Feature Widths on Masks for the Semiconductor Industry
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Apr 4, 2012
From: MUETEC AUTOMATISIERTE MIKROSKOPIE UND MESSTECHNIK GMBH
To: KLA-TENCOR MIE GMBH
Reel/Frame 027986/0540 →
Change of Name
Apr 4, 2012
From: VISTEC SEMICONDUCTOR SYSTEMS GMBH
To: KLA-TENCOR MIE GMBH
Reel/Frame 027987/0603 →
Change of Name
Apr 4, 2012
From: LEICA MICROSYSTEMS SEMICONDUCTOR GMBH
To: VISTEC SEMICONDUCTOR SYSTEMS GMBH
Reel/Frame 027987/0636 →