Patent Assignment
Reel/Frame 027987/0636
Change of Name
Recorded: 2012-04-04
Pages: 7
Assignor
LEICA MICROSYSTEMS SEMICONDUCTOR GMBH
Executed: 2006-02-08
Assignee
VISTEC SEMICONDUCTOR SYSTEMS GMBH
KUBACHER WEG 4, WEILBURG, 35781, GERMANY
Covered Property
(1)
Apparatus for Measuring Feature Widths on Masks for the Semiconductor Industry
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Correction to Our Error
Aug 18, 2005
From: HILLMANN, FRANK; VOLLRATH, WOLFGANG; SCHEURING, GERD; BRUECK, HANS-JUERGEN
To: LEICA MICROSYSTEMS SEMICONDUCTOR GMBH; MUETEC AUTOMATISIERTE MIKROSKOPIE UND MESSTECHNIK GMBH
Reel/Frame 016647/0193 →
Assignment of Assignor's Interest
Apr 4, 2012
From: MUETEC AUTOMATISIERTE MIKROSKOPIE UND MESSTECHNIK GMBH
To: KLA-TENCOR MIE GMBH
Reel/Frame 027986/0540 →
Change of Name
Apr 4, 2012
From: VISTEC SEMICONDUCTOR SYSTEMS GMBH
To: KLA-TENCOR MIE GMBH
Reel/Frame 027987/0603 →